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T-Shape MEMS PMPG design at low frequency range using Taguchi method

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Abstract

Piezoelectric (PZT) micro power generator (PMPG) has a great intention in designing and fabricating self-powered small electronic devices. These PZT-based devices are very sensitive to the resonance frequency, where the electrical power produced at resonance frequency has limited bandwidth. The sensitivity problem makes it difficult to design a PMPG that works at a specific frequency that matches the required application. In addition, PMPG resonance frequency is very sensitive to the design parameters, including the layers’ dimensions and their material, especially in the low-frequency range. This paper provides a method to design a PMPG that works at a specific frequency in a low-frequency range. In this study, T shape MEMS PMPG cantilever beam with six control parameters was considered. The control parameters are: (i) PZT material, (ii) proof mass material, (iii) PZT length in the x-axis, (iv) PZT width in the y-axis, (v) proof mass width in the y-axis, and (vi) proof mass thickness in the z-axis. Additionally, each control factor is selected with five levels to study its effects on the PMPG first resonance frequency at a low-frequency range using Taguchi optimization method. Furthermore, this research uses the multivariable linear regression model to confirm Taguchi method. This paper shows that the descending order of the control factors that influence the first resonance frequency is as follows: (i) PZT layer length in the x-axis, (ii) proof mass material, (iii) PZT layer width in the y-axis, (iv) proof mass width in the y-axis, (v) PZT material, and (vi)proof mass thickness in z-axis respectively. COMSOL Multiphysics 5.4 was used for simulation in this paper to design PMPG that vibrates in the Z-axis at the first resonance frequency of 500 Hz, and it can produce normal electric displacement of 80 \(\upmu\)C/m\(^2\) and electric energy density of 0.037 J/m\(^3\), which makes it suitable to power small electronic devises at 500 Hz.

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Authors and Affiliations

  1. Department of Electrical Engineering, Al-Hussein Bin Talal University, Maan, 71110, Jordan

    Mohd H. S. Alrashdan & Mahmoud Alnaanah

  2. Department of Communication Engineering, Al-Hussein Bin Talal University, Maan, 71110, Jordan

    Zouhair Al-Qudah & Amir Abu-Al-Aish

Authors
  1. Mohd H. S. Alrashdan
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  2. Mahmoud Alnaanah
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  3. Zouhair Al-Qudah
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  4. Amir Abu-Al-Aish
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Correspondence to Mohd H. S. Alrashdan.

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Alrashdan, M.H.S., Alnaanah, M., Al-Qudah, Z. et al. T-Shape MEMS PMPG design at low frequency range using Taguchi method. Microsyst Technol 29, 745–754 (2023). https://doi.org/10.1007/s00542-023-05443-8

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