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Analysis of resonance characteristics of solidly mounted resonator for mass sensing applications

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Abstract

Solidly mounted resonators (SMRs) have recently been adopted as alternatives to quartz crystal microbalance in bio-molecular and chemical detection field. In this study, the resonance characteristics of highly c-axis-textured AlN film-based SMR were investigated to obtain better sensitivity for mass sensing applications. The resonant frequencies and quality factors of SMR with different sizes and shapes of active resonant configuration were characterized. The results show that the effect of active resonant area on the resonance frequency is insignificant. However, the quality factor is strongly dependent on the size and shape of active resonant area. Optimized resonant patterns were applied to a 2.0 GHz SMR and mass sensor. Experimental results indicate that the sensitivity of the device achieved can be as high as 6,544 Hz cm2/ng, which shows the promising application in bio-molecular and industrial detecting application.

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Acknowledgments

The author would like to acknowledge financial support from the National Natural Science Foundation of China (NSFC) (Grant No. 61106070) and Supply–Demand Program of Science and Technology of Wuhan (No. 201150124019).

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Authors and Affiliations

  1. Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Faculty of Physics and Electronic Science, Hubei University, Wuhan, 430062, China

    J. **ong, X. L. Sun, P. Guo, D. Zheng & H. S. Gu

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  1. J. **ong
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  2. X. L. Sun
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  3. P. Guo
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  4. D. Zheng
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  5. H. S. Gu
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Correspondence to J. **ong.

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**ong, J., Sun, X.L., Guo, P. et al. Analysis of resonance characteristics of solidly mounted resonator for mass sensing applications. Appl. Phys. A 116, 1573–1577 (2014). https://doi.org/10.1007/s00339-014-8399-y

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  • DOI: https://doi.org/10.1007/s00339-014-8399-y

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