SpringerLink
Log in

Highly (100) oriented Pb(Zr0.52Ti0.48)O3/LaNiO3 films grown on amorphous substrates by pulsed laser deposition

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Pb(Zr0.52Ti0.48)O3 (PZT)/LaNiO3 (LNO) thin films with highly (100) out of plane orientation were produced on SiO2/Si(100) and alkaline earth aluminosilicate glass substrates by pulsed laser deposition (PLD). Orientations of both PZT and LNO films were evaluated using X-ray diffraction. The pure (100)-oriented PZT/LNO films were obtained under optimized deposition conditions. Time of flight-secondary ion mass spectrometry analysis showed that LNO could effectively block interdiffusion between the PZT films and the substrates. Fairly smooth surfaces of the PZT films with roughness of about 4 nm were observed using an atomic force microscope. Cross sectional examination revealed that the films grew in columnar grains. The PZT films grown on both SiO2/Si and glass substrates demonstrated very good ferroelectric characteristic at room temperature with remnant polarization of up to 26 μC/cm2.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. P. Muralt, J. Micromech. Microeng. 10, 136 (2000)

    Article  ADS  Google Scholar 

  2. P. Muralt, Integr. Ferroelectr. 17, 297 (1997)

    Google Scholar 

  3. G.L. Messing, S. Trolier-Mckinstry, E.M. Sabolsky, C. Duan, S. Kwon, B. Brahmaroutv, P. Park, H. Yilmar, P.W. Rehrig, K.O. Eitel, E. Suvaci, M. Seabaugh, K.S. Oh, Crit. Rev. Solid State Mater. Sci. 29, 45 (2004)

    Article  Google Scholar 

  4. K.P. Jayadevan, T.Y. Tseng, J. Mater. Sci. 13, 439 (2002)

    Google Scholar 

  5. T.M. Shaw, S. Trolier-Mckinstry, P.C. McIntyre, Ann. Rev. Mater. Sci. 30, 263 (2000)

    Article  Google Scholar 

  6. K. Wasa, S. Hayakawa, Handbook of Sputter Deposition Technology (Noyes Publication, Park Ridge, 1992)

    Google Scholar 

  7. D.L. Smith, Thin-Film Deposition: Principles and Practice (McGraw-Hill, New York, 1995)

    Google Scholar 

  8. S.U. Bilodeau, R. Carl, P. van Buskirk, J. Ward, Solid State Technol. 40, 235 (1997)

    Google Scholar 

  9. C.H. Lin, B.M. Yen, H.C. Kuo, H. Chen, T.B. Wu, G.E. Stillman, J. Mater. Res. 15, 115 (2000)

    ADS  Google Scholar 

  10. S. Miyake, K. Yamanoto, S. Fujihara, T. Kimura, J. Am. Ceram. Soc. 85, 992 (2002)

    Google Scholar 

  11. Y.J. Yu, F.P. Wang, H.L.W. Chan, L.C. Zhao, Appl. Phys. A78, 733 (2004)

    ADS  Google Scholar 

  12. Y. Liu, C.N. Xu, T. Watanabe, J. Mater. Sci. 34, 4129 (1999)

    Article  Google Scholar 

  13. S.S. Kim, T.S. Kang, J.H. Je, J. Mater. Res. 15, 2881 (2000)

    ADS  Google Scholar 

  14. T.J. Zhu, L. Lu, Appl. Phys. A 80, 1517 (2005)

    Article  ADS  Google Scholar 

  15. T.J. Zhu, L. Lu, C.V. Thompson, J. Cryst. Growth 273, 172 (2004)

    Article  Google Scholar 

  16. S.S. Kim, B.-T. Lee, Thin Solid Films 446, 307 (2004)

    Article  Google Scholar 

  17. T. Chen, X.M. Li, S. Zhang, H.R. Zeng, J. Cryst. Growth 270, 553 (2004)

    Article  Google Scholar 

  18. T. Yu, Y.-F. Chen, Z.-G. Liu, S.-B. **ong, L. Sun, X.-Y. Chen, N.-B. Ming, Mater. Lett. 26, 291 (1996)

    Article  Google Scholar 

  19. D.B. Chrisey, G.K. Hubler, Pulse Laser Deposition of Thin Films (John Wiley & Sons, New York, 1993)

    Google Scholar 

  20. K.S. Hwang, T. Manabe, T. Nagahama, I. Yamaguchi, T. Kumagai, S. Misuta, Thin Solid Films 347, 106 (1999)

    Article  Google Scholar 

  21. J.W. Hong, W. Jo, D.C. Kim, S.M. Cho. H.J. Nam, H.M. Lee, J.U. Bu, Appl. Phys. Lett. 75, 3181 (1999)

    ADS  Google Scholar 

  22. J.-J. Choi, G.-T. Park, C.-S. Park, H.-E. Kim, J. Mater. Res. 20, 728 (2005)

    Google Scholar 

  23. J.H. Cho, K.C. Park, Appl. Phys. Lett. 75, 549 (1999)

    Article  ADS  Google Scholar 

  24. J. Yin, Q.L. Li, Z.G. Liu, M. Wang, Z.C. Wu, T. Yu, J. Appl. Phys. A 70, 69 (2000)

    Article  ADS  Google Scholar 

  25. D. Bao, N. Mizutani, Appl. Phys. Lett. 77, 1041 (2000)

    Article  ADS  Google Scholar 

  26. B.G. Chae, Y.S. Yang, S.H. Lee, M.S. Jang, S.J. Lee, S.H. Kim, W.S. Baek, S.C. Kwon, Thin Solid Films 410, 107 (2002)

    Article  Google Scholar 

  27. M.-J. Shyu, T.-J. Hong, T.-B. Wu, Mater. Lett. 23, 221 (1995)

    Article  Google Scholar 

  28. C.-C. Yang, M.-S. Chen, T.-J. Hong, C.-M. Wu, J.-M. Wu, T.-B. Wu, Appl. Phys. Lett. 66, 2643 (1995)

    Article  ADS  Google Scholar 

  29. T.-F. Tseng, K.-S. Liu, T.-B. Wu, Appl. Phys. Lett. 68, 2505 (1996)

    Article  ADS  Google Scholar 

  30. J. Yin, X.Y. Chen, Q.C. Li, X.Y. Liu, Z.G. Liu, J. Mater. Sci. 33, 5631 (1998)

    Article  Google Scholar 

  31. L. Zheng, J. Zhu, Y. Zhang, S.W. Jiang, Y.Y. Li, X. H. Wei, J.L. Li, Appl. Surf. Sci. 252, 3609 (2006)

    Article  ADS  Google Scholar 

  32. W. Wu, K.H. Wong, C.L. Choy, J. Vac. Sci. Technol. A 18, 79 (2000)

    Article  ADS  Google Scholar 

  33. K. Kakimoto, H. Ohsato, H. Kakemoto, Y. Masuda, J. Eur. Ceram. Soc. 24, 993 (2004)

    Article  Google Scholar 

  34. G.A. Petersen Jr., J.R. Mcneil, Thin Solid Films 220, 87 (1992)

    Article  Google Scholar 

  35. N. Wakiya, K. Kuroyanagi, Y. Xuan, K. Shinozaki, N. Mizutani, Thin Solid Films 357, 166 (1999)

    Article  Google Scholar 

  36. W.C. Goh, S.Y. Xu, S.J. Wang, C.K. Ong, J. Appl. Phys. 89, 4497 (2001)

    Article  ADS  Google Scholar 

  37. S. Mahieu, G. De Winter, D. Delpa, R. De Gryse, J. Denul, Surf. Coat. Technol. 187, 122 (2004)

    Article  Google Scholar 

  38. B. Rodriguez-Navarro, Thin Solid Films 389, 288 (2001)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, National University of Singapore, Singapore, 117576, Singapore

    Y.H. Yu, M.O. Lai & L. Lu

Authors
  1. Y.H. Yu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M.O. Lai
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. L. Lu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to L. Lu.

Additional information

PACS

79.20.DS; 77.84.DY; 78.70.Ck

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yu, Y., Lai, M. & Lu, L. Highly (100) oriented Pb(Zr0.52Ti0.48)O3/LaNiO3 films grown on amorphous substrates by pulsed laser deposition. Appl. Phys. A 88, 365–370 (2007). https://doi.org/10.1007/s00339-007-3968-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-007-3968-y

Keywords

Search

Navigation