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Prediction of erosion volume of PDMS by cryogenic micro-abrasive jet machining based on dimensional analysis method and experimental verification

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Abstract

The polymer polydimethylsiloxane (PDMS) is used widely in microfluidic chips. At room temperature, when PDMS is machined by micro-abrasive jet machining (MAJM), its high elasticity means that it often suffers from processing defects such as abrasive embedding and a surface deterioration layer. Cryogenic micro-abrasive jet machining (CMAJM) based on the glass transition has been proposed, but a model for predicting the volume of material removed is yet to be established. In this study, orthogonal experiments are used to investigate how different processing parameters influence the material removal volume. The results show that the material removal volume is largest when the jet pressure is 0.6 MPa, the erosion angle is 60°, the erosion distance is 3.5 mm, and the scanning speed is 0.2 mm/s. A model is established to predict the material removal volume during the CMAJM of PDMS, and single-factor experiments are used to assess the model qualitatively. The results show that the model offers good predictions of how the material removal volume changes with the scanning speed and jet pressure.

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Abbreviations

A :

c1, c2, c3, c4, c5, c6, c7, c8, c9, QR, k1, k2, k3, K constants

P :

Air pressure (MPa)

θ :

Impact angle (deg)

l :

Erosion distance (mm)

v s :

Scanning speed (mm/s)

\( {\dot{m}}_a \) :

Abrasive mass flow rate (g/min)

d j :

Jet diameter (mm)

E a :

Elasticity modulus of Al2O3 (MPa)

d p :

Diameter of Al2O3 (μm)

ρ a :

Density of Al2O3 (g/mm3)

K IC :

Fracture toughness of PDMS (MPa)

ρ w :

Density of PDMS

E w :

Fracture toughness of PDMS (MPa)

η :

Test value (dB)

y i :

The observed data

\( {S}_y^2 \) :

The variance of yi

n :

The number of experiments

\( \overline{y} \) :

Means of yi

V :

Erosion removal volume (mm3)

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Availability of data and materials

The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.

Funding

This work was supported by National Natural Science Foundation of China (Grant No. 52075254) and Postgraduate Research & Practice Innovation Program of Jiangsu Province (KYCX20_0183).

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Authors and Affiliations

  1. College of Mechanical and Electrical Engineering, Nan**g University of Aeronautics and Astronautics, Nan**g, 210016, China

    Guiguan Zhang, Yuli Sun, Xu Liu, Liaoyuan Wang & Dunwen Zuo

Authors
  1. Guiguan Zhang
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  2. Yuli Sun
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  3. Xu Liu
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Contributions

Guiguan Zhang: investigation, data curation, visualization, and writing — original draft. Yuli Sun: project administration, funding acquisition, and writing — review and editing. Xu Liu: investigation and visualization. Liaoyuan Wang: data curation. Dunwen Zuo: conceptualization, supervision, and visualization.

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Correspondence to Yuli Sun.

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Zhang, G., Sun, Y., Liu, X. et al. Prediction of erosion volume of PDMS by cryogenic micro-abrasive jet machining based on dimensional analysis method and experimental verification. Int J Adv Manuf Technol 114, 2447–2455 (2021). https://doi.org/10.1007/s00170-021-07020-7

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