Abstract
Well adhered C3N4 films were prepared by Plasma Enhanced Chemical Vapor Deposition (PECVD) on industrial pure iron substrates using ternary Si−N−C films as buffer layer. XRD measurement showed that the C3N4 films belong to the α-C3N4 phase. Electrochemical experiments showed that the corrosive resistance of the pure iron raised by two orders of magnitude after being covered with the α-C3N4 coating.
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References
Liu A Y, Cohen M L. Prediction of new low compressibility solids[J].Science, 1989,245:841.
Liu A Y, Cohen M L. Structural properties and electronic stucture of low-compressibility materials: β-Si3N4 and hypothetical β-C3N4[J].Physt Rev, 1990,B41 (15):10727.
Teter D M, Hemley R J. Low-compressibility carbon nitrides[J].Science, 1996,271:53.
Liu A Y, Wentzcovitch R M. Stability of carbon nitride solids[J].Phys Rev, 1994,B50:10362.
Chen M Y, Li D, Lin X,et al. Analytical electron microscopy and Raman spectroscopy studies of carbon nitride thin films[J].J Vac Sci Technol, 1993,A11:521.
Veperk S, Weidmann J, Glate F. Plasma chemical vapor deposition and properties of hard C3N4 thin films [J].Ibid, 1995,A13:2914.
Marton D, Boyd K J, Al-bayati A H,et al. Carbon nitride deposited using energetic species: a two phases system[J].Phys Rev Lett, 1994,73:118.
Kumar S, Tansley T L. Element composition and microstructure of reactively sputtered carbon nitride thin films[J].Solid State Commun, 1994,88:803.
Yu K M, Cohen M L, Haller E E,et al. Observation of crystalline C3N4[J].Phys Rev, 1994,B49:5034.
Niu C, Lu Y Z, Lieber C M. Experimental realization of the covalent solid carbon nitride[J].Science, 1993,261:334.
Zhao X A, Wong C, Ttang Y C,et al. Reactive pulsed laser deposition of CN x films[J].Appl Phys Lett, 1995,66:2652.
Ogate K, Chubaci J F D, Fujimoto F. Properties of carbon nitride films with composition ratio of C/N= 0. 5-3 0 prepared by the ion and vapor deposition method[J].J Appl Phys, 1994,76:3791.
Rossi F, Andre B, Van Veen A,et al. Effect if ion beam assistance on the microstructure of non-hydrogenated amorphous carbon[J].J Mater Res, 1994,9:2440.
Bousetta A, Lu M, Bensaoula A. Physical properties of thin carbon nitrides films[J].J Vac Sci & Technol, 1995,A13:1639.
Wu D, Fu D, Guo H,et al. Structure and characteristics of C3N4 thin films prepared by rf plasma-enhanced chemical vapor deposition [J].Phys Rev, 1997,B56:4949.
Chen Yan, Guo Li-**, Wang E G. Synthesis and characterization of pure crystalline C-N films[J].J Mater Sci Lett, 1997,16:594.
Han H, Feldman B J. Structure and optical properties of carbon nitride[J].Solid State Commun, 1988,65:921.
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Foundation item: Supported by the National Natural Science Foundation of China(19875037)
Biography: ZHANG Wei(1975-), male, Graduate student. Research direction: thin film.
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Wei, Z., Zhi-hong, Z., Huai-xi, G. et al. Corrosion resistance properties and preparation of α-C3N4 thin films. Wuhan Univ. J. Nat. Sci. 4, 171–174 (1999). https://doi.org/10.1007/BF02841492
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DOI: https://doi.org/10.1007/BF02841492