Abstract
Microcrystalline silicon films have been found quite useful in amorphous silicon solar cells as a contact material in n-i-p cells. Microcrystalline silicon films are obtained when amorphous silicon films are prepared by R.F. glow discharge of SiH4 + H2 at higher power ratings. These films possess higher conductivity as well as high transmission than amorphous silicon films. The present paper reports the preparation technique ofµc-SiH films using R.F. capacitive glow discharge of hydrogen-diluted silane. X-ray studies andtem studies of the films indicate microcrystallinity of the films. The electrical and optical properties are also reported.
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Cullity B D 1959Elements of x-ray diffraction (Massachusetts: Addison-Wesley) 99
Dubey G C, Singh R A, Pal S and Gopal Rao M 1983 Second International Workshop on the Physics of Semiconductor Devices, New Delhi
Dubey G C, Singh R A, Pal S and Gopal Rao M 1985Photovoltaic materials and devices, Proc. Symp. (eds) B K Das and S N Singh (Delhi: Wiley Eastern) p. 254
Hamakawa Y and Okamoto H 1983Amorphous Semiconductor Tech. Devices 6 182
Hiraki A, Imura T, Modi K and Tashiro M 1981J. Phys. (Paris),C-4 277
Kaya H, Imura T, Kusao T, Hiraki A, Nakamura O, Okayasu Y and Matsumura M 1984Jpn. J. Appl. Phys. 23 L549
Kamuro S, Aoyagi J, Segawa Y, Namba S, Masuyama A, Matsuda A and Tanaka K 1984J. Appl. Phys. 56 1658
Matsuda A 1983J. Non-Cryst. Solids 59–60 767
Nakatani K, Yano M, Suzuki and Okinawa A 1983J. Non-Cryst. Solids 59–60 827
Tanaka K and Matsuda A 1983Amorphous Semiconductor Tech. Devices 6 161
Uchida Y, Ichimura T, Veno M and Haruki H 1982Jpn J. Appl. Phys. 21 1586
Uchida Y, Ichimura T, Veno M and Ohsawa M 1981J. Phys. (Paris) C-4 265
Vamier P E, Kampas F J, Corderman R R and Rajeswaran G 1984J. Appl. Phys. 56 1812
Veprek S and Maracek V 1968Solid State Electron. 11 683
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Dubey, G.C., Singh, R.A., Mukherjee, S.N. et al. Electrical and optical properties of µc-SiH films. Bull. Mater. Sci. 8, 267–277 (1986). https://doi.org/10.1007/BF02744132
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DOI: https://doi.org/10.1007/BF02744132