Abstract
The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber.
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This work was support by National Nature Science Foundation of China
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Tian, Y., Hong, Y., Fu, S. et al. The study of LIGA technique at NSRL. Microsystem Technologies 2, 171–173 (1995). https://doi.org/10.1007/BF02739553
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DOI: https://doi.org/10.1007/BF02739553