Abstract
By X-ray diffraction and transmission diffraction electron microscopy methods, the phase composition, macro- and microstresses, and microstructure in a Ti1–x Al x N coating and a substrate were investigated. The coatings were deposited by magnetron sputtering of a Ti–Al target in an Ar + N gas reaction mixture on a substrate of austenitic steel 12Kh18N10T preliminarily bombarded with a titanium ion beam. It was found that the increase in the duration of the preliminary ion treatment of the substrate leads to increasing compression macrostresses and refining of a nanocrystalline columnar microstructure in the Ti1–x Al x N coating.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Sergeev, V.P., Fedorishcheva, M.V., Voronov, A.V., Sergeev, O.V., Yanovskii, V.P., and Psakh’e, S.G, Tribomechanical properties and structure of nanocomposite Ti1–xAlxN coatings, Izv. Tomsk. Politekh. Univ., 2006, vol. 309, no. 2, pp. 149–153.
Beresnev, V.M., Pogrebnyak, A.D., Azarenkov, N.A., Farenik, B.I., and Kirik, G.V, Nanocrystalline and nanocomposite coatings: structure and properties, Fiz. Inzh. Poverkhn., 2007, vol. 5, nos. 1–2, pp. 4–27.
Horling, A., Hultman, L., Oden, M., Sjolen, J., and Karlsson, L, Mechanical properties and machining performance of Ti1–xAlxN-coated cutting tools, Surf. Coat. Technol., 2005, vol. 191, pp. 384–392.
Moreno Tellez, C.M., Sanchez, J.M., and Higuera Cobos, O.F, Characterizing µ-AlTiN coating and assessing its performance during Ti-6Al-4V milling, Ing. Invest., 2013, vol. 33, no. 2, pp. 9–15.
Korotaev, A.D., Borisov, D.P., Moshkov, V.Yu., Ovchinnikov, S.V., Pinzhin, Yu.P., and Tyumentsev, A.C., Elastic-strained state of multi-element superhard coatings, Fiz. Mezomekh., 2009, vol. 12, no. 4, pp. 79–91.
Solov’ev, A.A., Sochugov, N.S., and Oskomov, K.V, Effect of residual internal stresses in tin coatings on specific losses in anisotropic electrical steel, Phys. Met. Metallogr., 2010, vol. 109, no. 2, pp. 111–119.
Petrov, I., Barna, P.B., Hultman, L., and Greene, J.E, Microstructural evolution during film growth, J. Vac. Sci. Technol., A, 2003, vol. 21, no. 5, pp. 117–128.
Gorelik, O.S., Rastorguev, L.N., and Skakov, Yu.A., Rentgenograficheskii i elektronno-opticheskii analiz (X-Ray and Electron-Optical Analysis), Moscow: Metallurgiya, 1970.
Meisner, L.L., Lotkov, A.I., Ostapenko, M.G., and Gudimova, E.Yu., X-ray diffraction analysis of the internal gradient stresses in titanium nickelide after electron-beam surface treatment, Fiz. Mezomekh., 2012, vol. 15, no. 3, pp. 79–89.
Koneva, N.A., Kozlov, E.V., Popova, N.A., Ivanov, Yu.F., Ignatenko, L.N., Sizonenko, N.R., and Pekarskaya, E.E., The structure and sources of long-range stress fields in ultrafine copper, in Struktura, fazovye prevrashcheniya i svoistva nanokristallicheskikh materialov (The Structure, Phase Transformations, and Properties of Nanocrystalline Materials), Yekaterinburg: Inst. Fiz. Met., Ural. Otd., Ross. Akad. Nauk, 1997, pp. 125–140.
Honeycombe, R.W.K., Plastic Deformation of Metals, London: Edward Arnold, 1968.
Kozlov, E.V., Koneva, N.A., and Popova, N.A, Dislocation and diffusion deformation mechanisms in ultrafine-grained materials and free volume role, Bull. Russ. Acad. Sci.: Phys., 2009, vol. 73, no. 9, pp. 1227–1232.
Perevalova, O.B., Konovalova, E.V., Koneva, N.A., and Kozlov, E.V., Vliyanie atomnogo uporyadocheniya na zernogranichnye ansambli GTsK-tverdykh rastvorov (Influence of Atomic Ordering on the Grain Boundary Ensembles in FCC-Solid Solutions), Tomsk: Izd. Nauchno-Tekh. Lit., 2014.
Solntsev, Yu.P., Materialovedenie (Materials Science), St. Petersburg: Khimizdat, 2007.
Didenko, A.N., Sharkeev, Yu.P., Kozlov, E.V., and Ryabchikov, A.I., Effekty dal’nodeistviya v ionnoimplantirovannykh metallicheskikh materialakh (Long-Range Effects in Ion-Implanted Metallic Materials), Tomsk: Izd. Nauchno-Tekh. Lit., 2004.
Kalinichenko, A.I., Perepelkin, S.S., and Strel’nitskii, V.E, Formation of compression stresses in thin films under ion irradiation, Vopr. At. Nauki Tekh., Ser.: Fiz. Radiats. Povrezhdenii Radiats. Materialoved., 2007, no. 6 (91), pp. 116–119.
Fedorischeva, M.V., Sergeev, V.P., Kalashnikov, M.P., and Voronov, A.V, Internal stresses and structure of multilayer coatings on the basis of Zr–Y–O/Si–Al–N, AIP Conf. Proc., 2014, vol. 1623, pp. 147–150. http://dx.doi.org/10.1063/1.4898903.
Tolmacheva, G.N. and Kuprin, A.S, Application of nanoindentation technique for study of mechanical properties of TiN-based superhard coatings, Fiz. Inzh. Poverkh., 2011, vol. 9, no. 2, pp. 157–163.
Osobennosti struktury i svoistv perspektivnykh materialov (Structure and Properties of Advanced Materials), Potekaev, A.I., Ed., Tomsk: Izd. Nauchno-Tekh. Lit., 2006.
Dudarev E.F. Mikroplasticheskaya deformatsiya i predel tekuchesti polikristallov (Microplastic Deformation and Maximum Stress of Single Crystals), Tomsk: Tomsk. Gos. Univ., 1988.
Trefilov, V.I., Moiseev, V.F., Pechkovskii, E.P., et al., Deformatsionnoe uprochnenie i razrushenie polikristallicheskikh metallov (Strain Hardening and Fracture of Polycrystalline Metals), Kiev: Naukova Dumka,1989.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © O.B. Perevalova, A.V. Panin, M.P. Kalashnikov, A.A. Akulinkin, I.A. Bozhko, V.P. Sergeev, 2016, published in Fizika i Khimiya Obrabotki Materialov, 2016, No. 2, pp. 40–51.
Rights and permissions
About this article
Cite this article
Perevalova, O.B., Panin, A.V., Kalashnikov, M.P. et al. Elastic stresses and microstructure of TiAlN coatings. Inorg. Mater. Appl. Res. 8, 434–443 (2017). https://doi.org/10.1134/S2075113317030194
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S2075113317030194