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Discharge KrF Laser with a High Specific Energy of Radiation

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Abstract

We report the results of experimental and numerical investigations of a discharge KrF laser with specific pump power of 3.5 and 7 MW/cm3; generation is obtained with specific radiation pulse energy of about 6 and 9.5 J/L for an internal energy efficiency of about 4%. Time dependences of the formation of charged and excited particles in a dense excimer plasma with an electron concentration of ~1016 cm–3 are obtained. The conditions for effective operation of the laser are proposed, which will ensure a further increase in the specific radiation energy by more than two times with preserved high internal laser efficiency relative to the energy input into the discharge.

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Funding

This study was supported by the Russian Science Foundation (agreement no. 20-79-10297).

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Authors and Affiliations

  1. Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia

    Yu. N. Panchenko, A. V. Puchikin, S. A. Yampolskaya & M. V. Andreev

  2. Zuev Institute of Atmospheric Optics, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia

    E. V. Gorlov & V. I. Zharkov

Authors
  1. Yu. N. Panchenko
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  2. A. V. Puchikin
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  3. S. A. Yampolskaya
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  4. M. V. Andreev
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  5. E. V. Gorlov
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  6. V. I. Zharkov
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Corresponding author

Correspondence to Yu. N. Panchenko.

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The authors declare that there is no conflicts of interest.

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Translated by N. Wadhwa

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Panchenko, Y.N., Puchikin, A.V., Yampolskaya, S.A. et al. Discharge KrF Laser with a High Specific Energy of Radiation. Tech. Phys. 67, 215–220 (2022). https://doi.org/10.1134/S1063784222040041

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  • DOI: https://doi.org/10.1134/S1063784222040041

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