SpringerLink
Log in

The Element Composition Variation in Lead Zirconate Titanate upon the Ion-Plasma Deposition: Experiment and Simulation

  • FERROELECTRICITY
  • Published:
Physics of the Solid State Aims and scope Submit manuscript

Abstract

The element composition modification is experimentally studied in PZT thin films obtained via the RF magnetron sputtering with variable working gas pressure. The experimental data were interpreted through the statistic simulation of thermalization and diffusion of sprayed Pb, Zr, and Ti atoms during the ion-plasma deposition of PZT thin films. The simulation data are shown to adequately describe (within the limits of 5%) the change in element composition at various pressures of the gas environment. The study conducted enables one to produce PZT thin films with a set element composition, which is essential for optimizing the electric and physical properties of solid solutions at the morphotropic phase boundary.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price includes VAT (Germany)

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.
Fig. 6.
Fig. 7.

Similar content being viewed by others

REFERENCES

  1. S. Trolier-McKinstry and P. Muralt, J. Electroceram. 12, 7 (2004).

    Article  Google Scholar 

  2. P. Muralt, J. Am. Cer. Soc. 91, 1385 (2008).

    Article  Google Scholar 

  3. B. Jaffe, W. Cook, and H. Jaffe, Piezoelectric Ceramics (Academic, New York, 1971).

    Google Scholar 

  4. B. Noheda, D. E. Cox, G. Shirane, J. A. Gonzalo, L. E. Cross, and S.-E. Park, Appl. Phys. Lett. 74, 2059 (1999).

    Article  ADS  Google Scholar 

  5. B. Noheda and D. E. Cox, Phase Trans. 79, 5 (2006).

    Article  Google Scholar 

  6. A. L. Kholkin, K. G. Brooks, D. V. Taylor, S. Hiboux, and N. Setter, Integr. Ferroelectr. 22, 525 (1998).

    Article  Google Scholar 

  7. I. P. Pronin, E. Yu. Kaptelov, E. A. Tarakanov, and V. P. Afanas’ev, Phys. Solid State 44, 1736 (2002).

    Article  ADS  Google Scholar 

  8. V. V. Osipov, D. A. Kiselev, E. Yu. Kaptelov, S. V. Senkevich, and I. P. Pronin, Phys. Solid State 57, 1793 (2015).

    Article  ADS  Google Scholar 

  9. J.-S. Yang, Y. S. Kang, I. Kang, S. M. Lim, S. J. Shin, J. W. Lee, and K. Nur, IEEE Trans. Ultrason., Ferroelectr. Freq. Control 64, 617 (2017).

    Article  ADS  Google Scholar 

  10. V. A. Volpyas and A. B. Kozyrev, J. Exp. Theor. Phys. 113, 172 (2011).

    Article  ADS  Google Scholar 

  11. V. A. Volpyas, A. Y. Komlev, R. A. Platonov, and A. B. Kozyrev, Phys. Lett. A 378, 3182 (2014).

    Article  ADS  Google Scholar 

  12. V. A. Volpyas, A. V. Tumarkin, A. K. Mikhailov, A. B. Kozyrev, and R. A. Platonov, Tech. Phys. Lett. 42, 758 (2016).

    Article  ADS  Google Scholar 

  13. D. M. Dolgintsev, V. P. Pronin E. Yu. Kaptelov, S. V. Senkevich, and I. P. Pronin, Tech. Phys. Lett. 45 (3), 245 (2019).

  14. G. M. Turner, I. S. Falconer, B. W. James, and D. R. J. McKenzie, J. Appl. Phys. 65, 3671 (1989).

    Article  ADS  Google Scholar 

  15. C. S. Nimisha and G. Mohan Rao, J. Appl. Phys. 109, 114910 (2011).

    Article  ADS  Google Scholar 

  16. E. K. Hollmann, V. A. Volpyas, and R. Wordenweber, Phys. C (Amsterdam, Neth.) 425, 101 (2005).

Download references

Author information

Authors and Affiliations

  1. State Electrotechnical University LETI, St. Petersburg, Russia

    V. A. Vol’pyas, A. B. Kozyrev & A. V. Tumarkin

  2. Herzen State Pedagogical University of Russia, St. Petersburg, Russia

    D. M. Dolgintsev & V. P. Pronin

  3. Ioffe Institute, St. Petersburg, Russia

    E. Yu. Kaptelov, S. V. Senkevich & I. P. Pronin

Authors
  1. V. A. Vol’pyas
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. B. Kozyrev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. V. Tumarkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. D. M. Dolgintsev
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. V. P. Pronin
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. E. Yu. Kaptelov
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. S. V. Senkevich
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. I. P. Pronin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to I. P. Pronin.

Ethics declarations

The authors declare that they have no conflict of interest.

Additional information

Translated by O. Maslova

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Vol’pyas, V.A., Kozyrev, A.B., Tumarkin, A.V. et al. The Element Composition Variation in Lead Zirconate Titanate upon the Ion-Plasma Deposition: Experiment and Simulation. Phys. Solid State 61, 1223–1227 (2019). https://doi.org/10.1134/S1063783419070308

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063783419070308

Search

Navigation