Abstract
TiN coatings are deposited onto AISI430 stainless-steel substrates in an Ar + N2 atmosphere, under a constant total pressure of 0.5 Pa, at a variable nitrogen-flow rate of f(N2) = 0.5–10 cm3/min and magnetron-sputtering currents of I m = 10, 30, and 100 A. The dependences of the coating microhardness, macrostress, and growth rate on f(N2) and I m are obtained. Two microharndess maxima at f(N2) = 1 and 4 cm3/min and I m = 30 A are found. The maximum microhardness of the coatings reaches 32 ± 5 GPa at a maximum macrostress of 7 GPa.
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Original Russian Text © A.S. Mamaev, A.V. Chukin, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 10, pp. 12–15.
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Mamaev, A.S., Chukin, A.V. Effect of the nitrogen flow rate on the microhardness and microstructure of TiN coatings deposited by high power pulsed magnetron sputtering. J. Surf. Investig. 9, 980–983 (2015). https://doi.org/10.1134/S1027451015050365
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DOI: https://doi.org/10.1134/S1027451015050365