Abstract
This article presents an extensive review of the developments in the field of piezoelectric motors involving different operational concepts. The review is carried out for ultrasonic motors and surface acoustic wave motors using resonant vibrations of piezoelectric substrates. The traditional upbringings of ultrasonic motors using standing and travelling waves along with surface acoustic wave driven motors are presented. Further this research work gives a scope to understand the recent development of various driving principles and different characteristics of piezoelectric motors.
Similar content being viewed by others
References
Auld BA (1973) Acoustic fields and waves in solids, vol 1. Wiley, Mississauga
Barth HV (1973) Ultrasonic drive motor. IBM Tech Discl Bull 16(7):2263
Behera B, Nemade HB, Trivedi S (2016) Modelling and finite element simulation of a dual friction-drive SAW motor using flat slider. In: IEEE Ultrasonics Symposium, pp 1–4
Campbell C (ed) (1989) Surface acoustic wave devices and their signal processing applications. Academic, Boston
Cheng LP, Zhang GM, Zhang SY, Yu J, Shui XJ (2002) Miniaturization of surface acoustic waves rotary motor. Elsevier Ultrason 39:591–594
Feenstra PJ, Breedveld PC, Vermeulen MMP, Peeters FGP (2002) Modelling and experimental validation of a linear surface acoustic wave motor prototype. In: Proceedings of mechatronics, pp 24–26
Fujii Y, Kotani H, Masaya T, Mizuno T (2007) Surface acoustic wave linear motor using segment-structured diamond-like carbon films on contact surface. In: IEEE Ultrasonics Symposium. pp 2543–2546
Gu H, Ma D, Zhang S, Cheng L, Shui X (2008) Theoretical analysis of non-contact linear motors driven by surface acoustic waves. In: Proceedings of the IEEE, pp 3–6
Hirata H, Ueha S (1993) Characteristics estimation of a traveling wave type ultrasonic motor. lEEE Trans Ultrason Ferroelectr Freq Control 40:402–406
Koc B, Bouchilloux P, Uchino K (2000) Piezoelectric micromotor using a metal-ceramic composite structure. IEEE Trans Ultrason Ferroelectr Freq Control 47:836–843
Kurosawa MK (2009) Ultrasonic linear motor using travelling surface acoustic wave. In: Proceedings of IEEE ultrasonics symposium (IEEE Press), pp 1096–1105
Kurosawa M, Ueha S (1991) Hybrid transducer type ultrasonic motor. IEEE Trans Ultrason Ferroelectr Freq Control 38:89–92
Kurosawa MK, Takahashi M, Higuchi T (1996) Ultrasonic linear motor using surface acoustic waves. IEEE Trans Ultrason Ferroelectr Freq Control 43:901–906
Kurosawa MK, Kodaira O, Tsuchitoi Y, Higuchi T (1998a) Transducer for high speed and large thrust ultrasonic linear motor using two sandwich-type vibrators. IEEE Trans Ultrason Ferroelectr Freq Control 45:1188–1195
Kurosawa MK, Chiba M, Higuchi T (1998b) Evaluation of a surface acoustic wave motor with a multi-contact-point slider. Smart Mater Struct 7:305–311
Lavrinenko V, Nekrasov M (1965) Piezoelectric motor. USSR Patent 217,509 (In Russian)
Mamishev AV, Sundara-Rajan K, Yang F, Du Y, Zahn M (2004) Interdigital sensors and transducers. Proc IEEE 92:808–845
Morgan D (2007) Surface acoustic wave filters with applications to electronic communications and signal processing. Elsevier, Academics Press, Oxford
Morita T (2003) Review on miniature piezoelectric motor. Sens Actuators A Phys 103:291–300
Morita T, Kurosawa MK, Higuchi T (1999) Simulation of surface acoustic wave motor with spherical slider. IEEE Trans Ultrason Ferroelectr Freq Control 46:929–934
Moroney RM, White RM, Howe RT (1990) Ultrasonic micromotors: physics and applications. In: Proceedings of the IEEE, pp 182–187
Nakamura Y, Kurosawa MK, Shigematsu T (2003) Effects of ceramic thin film coating on friction surfaces for surface acoustic wave linear motor. In: IEEE Ultrasonics Symposium (IEEE Press), pp 1766–1769
Osakabe N, Kurosawa M, Higuchi T, Shinoura O (1998) Surface acoustic wave linear motor using silicon slider. In: Proceedings of the IEEE (IEEE), pp 390–395
Royer D, Dieulesaint E (1996) Elastic waves in solids: free and guided propagation, vol 1. Springer, Northampton
Royer D, Dieulesaint E (1999) Elastic waves in solids: generation, acousto-optic interaction, applications, vol 2. Springer, New York
Sakano K, Kurosawa MK, Shigematsu T (2008) Surface acoustic wave motor with flat plane slider. In: Proceedings of the IEEE, pp 243–248
Sakano K, Kurosawa MK, Shigematsu T (2010) Driving characteristics of a surface acoustic wave motor using a flat-plane slider. Adv Robot 24:1407–1421
Sano A, Matsui Y, Shiokawa S (1997) A new manipulator based on surface acoustic wave streaming. In: IEEE ultrasonics symposium, pp 467–470
Sashida T (1985) Motor device utilizing ultrasonic oscillation. US Patent 4,562,374
Shigematsu T, Kurosawa MK (2008a) Friction drive of a SAW motor. Part III: modeling. IEEE Trans Ultrason Ferroelectr Freq Control 55:2266–2276
Shilton RJ, Langelier SM, Friend JR, Yeo LY (2012) Surface acoustic wave solid-state rotational micromotor. Appl Phys Lett 100(3):33503
Shigematsu T, Kurosawa MK (2008b) Friction drive of a SAW motor. Part I: measurements. IEEE Trans Ultrason Ferroelectr Freq Control 55:2005–2015
Shigematsu T, Kurosawa MK, Asai K (2003a) Sub-nanometer step** drive of surface acoustic wave motor. Proc IEEE 2:299–302
Shigematsu T, Kurosawa MK, Asai K (2003b) Nanometer step** drives of surface acoustic wave motor. IEEE Trans Ultrason Ferroelectr Freq Control 50:376–385
Takahashi M, Kurosawa M, Higuchi T (1995) Direct frictional driven surface acoustic wave motor. In: The 8th international conference on solid-state sensors and actuators, and Eurosensors IX (Stockholm, Sweden), pp 3–6
Takano T, Tomikawa Y, Ogasawara T, Sugawara S, Konno M (1987) Ultrasonic motor using piezoelectric ceramic multi mode vibrators. In: Proceedings on ultrasonic electronics
Thompson M (1997) Surface-launched acoustic wave sensors: chemical sensing and thin-film characterization. Wiley, New York
Tjeung RT, Hughes MS, Yeo LY, Friend JR (2011) Surface acoustic wave micro motor with arbitrary axis rotational capability. Appl Phys Lett 99:214101
Uchino K (1998) Piezoelectric ultrasonic motors: overview. Smart Mater Struct 7:273–285
Uchino K (ed) (2010) Advanced piezoelectric materials science and technology. Woodhead Publishing Limited, New Delhi
Uchino K, Kato K, Imaizumi M, Tohda M (1988) Ultrasonic linear motors using piezoelectric actuators. J Jpn Ceram 96:1131–1136
Ueha S (1988) Present stae of art ultrasonic motors. Jpn J Appl Phys 28:3–6
Ueha S, Kurosawa M (1988) Ultrasonic motors. In: IEEE ultrasonics symposium, pp 519–522
Vives AA (ed) (2008) Piezoelectric transducers and applications. Springer, Berlin, Heidelberg
Wakai T, Kuribayashi M and Higuchi T (1998) Transducer for an ultrasonic linear motor with flexible driving part. In: IEEE ultrasonics symposium, pp 683–686
Williams ALW, Brown WJ (1948) Piezoelectric motor. US Patent 2,439,499
Zhang G, Cheng L, Zhang S, Yu J, Shui X (2000) Surface acoustic wave rotation motor. IEEE Electron Lett 36:1437–1438
Zhao C (2011) Ultrasonic motors technologies and applications. Springer, Nan**g
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Behera, B., Nemade, H.B. Recent developments of piezoelectric motors with diverse operating principles. ISSS J Micro Smart Syst 6, 173–185 (2017). https://doi.org/10.1007/s41683-017-0015-x
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s41683-017-0015-x