Abstract
TiO2 thin films were deposited on glass substrates through magnetron sputtering using a Ti target and an Ar-O2 gas mixture, with different electrical currents ranging from 0.2 to 0.6 A. The impact of varying the current on the structure and properties of the TiO2 films was investigated in a systematic manner through techniques such as X-ray diffraction (XRD), scanning electron microscopy with field emission gun (SEM-FEG), Raman spectroscopy, and visible ultraviolet spectroscopy (UV/Vis). The XRD results indicated the presence of both anatase and rutile phases, with the intensities of these phases increasing as the electrical current increased. Furthermore, the crystallinity, particle size, transmittance, and interference fringes were observed to increase as the electrical current was raised.
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da Costa Santos, E.J., de Queiroz, J.C.A., Libório, M.S. et al. Effects of Electric Current on the Structural and Optical Properties of TiO2 Films. Braz J Phys 53, 138 (2023). https://doi.org/10.1007/s13538-023-01352-3
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DOI: https://doi.org/10.1007/s13538-023-01352-3