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Design and Positioning Control of a Flexure-Based Nano-positioning Stage Driven by Halbach Array Voice Coil Actuator

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Abstract

A long-stroke nano-positioning stage driven by voice coil actuator (VCA) and supported by flexure guide is designed in this paper. The Halbach permanent magnet array is implemented in the VCA to improve the air-gap flux density with the magnetic concentration effect. The air-gap magnetic field is modeled with an equivalent magnetic structure and verified by finite element analysis. The proposed equivalent magnetic structure reduces the number of boundary condition equations and hence simplifies the analysis procedure. Besides, a novel spring-dam** tuning method is proposed based on the equivalent dynamic model of the closed-loop system. This tuning method regards P control and D control as a virtual spring and a virtual damper. The controller parameters are tuned in an intuitive way. Experimental results show that the positioning stage is capable of achieving a resolution of 40 nm within a stroke of 0.8 mm with high repeatability. The spring-dam** tuning method ensures better control performance compared to Ziegler Nichols (Z–N) tuning method where overshoot and settling time are decreased.

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Acknowledgements

This work was supported in part by the National Natural Science Foundation of China under Grant U1609206, 51807194 and 51905523, in part by the Science, Technology and Innovation Commission of Shenzhen Municipality under Grant JSGG20201103153805015, in part by the Ningbo Municipal Bureau of Science and Technology under Grant 2018B10058, 2018B10068 and 2018B10069.

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Authors and Affiliations

  1. Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, China

    Chi Zhang, **aolu Huang, Miao Yang, Si-Lu Chen, **hua Chen & Guilin Yang

  2. Zhejiang Key Laboratory of Robotics and Intelligent Manufacturing Equipment Technology, Ningbo, 315201, China

    Chi Zhang, **aolu Huang, Miao Yang, Si-Lu Chen, **hua Chen & Guilin Yang

  3. University of Chinese Academy of Sciences, Bei**g, 100049, China

    **aolu Huang

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  1. Chi Zhang
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Correspondence to Chi Zhang.

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**aolu Huang, Miao Yang, Si-Lu Chen, **hua Chen and Guilin Yang have contributed equally to this work.

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Zhang, C., Huang, X., Yang, M. et al. Design and Positioning Control of a Flexure-Based Nano-positioning Stage Driven by Halbach Array Voice Coil Actuator. Int. J. Precis. Eng. Manuf. 23, 281–290 (2022). https://doi.org/10.1007/s12541-022-00619-0

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