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Design, analysis, and test of a decoupled flexure-based 5-DOF micro-positioning platform

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Abstract

This paper presents the mechanical design, simulation analysis and experimentation of a decoupled 5-degree-of-freedom (5-DOF) micro-positioning platform, which is composed of a 2-DOF micro-displacement platform, a 1-DOF micro-displacement platform and a 2-DOF micro-rotation platform in series. Double four-bar parallelogram structure and a new 2-DOF rotary guiding mechanism based on flexure hinges are applied to realize motion decoupling, and the displacement of the piezoelectric actuator is amplified with a bridge mechanism. The static models of the micro-displacement platform and micro-rotation platform are established by the compliance matrix method. Then the dynamic models of the two sub-platforms are established to obtain their natural frequencies. The performance of the 5-DOF platform is evaluated through finite element analysis and experiment test. It turns out that the theoretical model and simulation model established in this paper have high accuracy, the platform also performs well in motion decoupling, motion stroke and natural frequency.

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Acknowledgments

This work was supported by the National Key R&D Program of China (No.2018YFB1308400).

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Author notes

  1. These authors equally contributed to this work as first author.

Authors and Affiliations

  1. School of Mechanical Engineering, Tongji University, Shanghai, 201804, China

    Jian Zhang, Yujia Zhang & Minglun Dong

Authors
  1. Jian Zhang
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  2. Yujia Zhang
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  3. Minglun Dong
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Corresponding author

Correspondence to Jian Zhang.

Additional information

Jian Zhang received his Ph.D. in the School of Mechatronic Engineering, Harbin Institute of Technology, China, in 2005. Currently, he is an Associate Professor in School of Mechanical Engineering, Tongji University, China. His research interests include robotics, computer vision.

Yujia Zhang received his B.S. in the School of Mechatronic Engineering and Automation, Shanghai University, China, in 2019. Currently, he is studying for a master’s degree from the School of Mechanical Engineering, Tongji University, China. His research direction is precision mechanism.

Minglun Dong received the B.E. degree from the Hebei University of Technology in 2021. Now, he is studying for a master’s degree in Tongji University. His research interests focus on automatic control of robot and machine vision.

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Zhang, J., Zhang, Y. & Dong, M. Design, analysis, and test of a decoupled flexure-based 5-DOF micro-positioning platform. J Mech Sci Technol 36, 3883–3896 (2022). https://doi.org/10.1007/s12206-022-0711-8

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  • DOI: https://doi.org/10.1007/s12206-022-0711-8

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