Abstract
Free-standing metallic nanostructures are considered to be highly relevant to many branches of science and technology with applications of three dimensional metallic nanostructures ranging from optical reflectors, actuators, and antenna, to free-standing electrodes, mechanical, optical, and electrical resonators and sensors. Strain-induced out-of-plane fabrication has emerged as an effective method which uses relaxation of strain-mismatched materials. In this work, we report a study of the thermal annealing-induced shape modification of free-standing nanostructures, which was achieved by introducing compositional or microstructural nonuniformity to the nanowires. In particular gradient, segmented and striped hetero-nanowires were grown by focused-ion-beam-induced chemical vapor deposition, followed by rapid thermal annealing in a N2 atmosphere. Various free-standing nanostructures were produced as a result of the crystalline/grain growth and stress relief.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Ferain I, Colinge C A, Colinge J P. Multigate transistors as the future of classical metal-oxide-semiconductor field-effect transistors. Nature, 2011, 479: 310–316
Valentine J, Zhang S, Zentgraf T, et al. Three-dimensional optical metamaterial with a negative refractive index. Nature, 2008, 455: 376–379
Gouma P, Kalyanasundaram K, **ao Y, et al. Nanosensor and breath analyzer for ammonia detection in exhaled human breath. Sensors J IEEE, 2010, 10: 49–53
Tian B Z, Karni T, Qing Q, et al. Three-dimensional, flexible nanoscale field-eEffect transistors as localized bioprobes. Science, 2010, 329: 830–834
Noda S, Tomoda K, Yamamoto N, et al. Full Three-dimensional photonic bandgap crystals at near-infrared wavelengths. Science, 2000, 289: 604–606
Romans E J, Osley E J, Young L, et al. Three-dimensional nanoscale superconducting quantum interference device pickup loops. Appl Phys Lett, 2010, 97: 222506
Zhang S, Fan W, Minhas B K, et al. Midinfrared resonant magnetic nanostructures exhibiting a negative permeability. Phys Rev Lett, 2005, 94: 037402
Fan K, Strikwerda A C, Tao H, et al. Stand-up magnetic metamaterials at terahertz frequencies. Opt Express, 2011, 19: 12619–12627
Burckel D B, Wendt J R, Ten Eyck G A, et al. Micrometer-scale cubic unit cell 3D metamaterial layers. Adv Mater, 2010, 22: 5053–5057
Chen C C, Hsiao C T, Sun S L, et al. Fabrication of three dimensional split ring resonators by stress-driven assembly method. Opt Express, 2012, 20: 9415–9420
Rill M S, Plet C, Thiel M, et al. Photonic metamaterials by direct laser writing and silver chemical vapour deposition. Nat Mater, 2008, 7: 543–546
Gansel J K, Thiel M, Rill M S, et al. Gold helix photonic metamaterial as broadband circular polarizer. Science, 2009, 325: 1513–1515
Cui A, Li W, Luo Q, et al. Free-standing nanostructures for three-dimensional superconducting nanodevices. Appl Phys Lett, 2012, 100: 143106
Cui A, Li W, Luo Q, et al. Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation. Microelectron Eng, 2012, 98: 409–413
Cui A, Fenton J C, Li W X, et al. Ion-beam-induced bending of free-standing amorphous nanowires: The importance of the substrate material and charging. Appl Phys Lett, 2013, 102: 213112
Luo J K, Huang R, He J H, et al. Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure. Sensors Actuators A-Phys, 2006, 132: 346–353
Py C, Reverdy P, Doppler L, et al. Capillary origami: Spontaneous wrap** of a droplet with an elastic sheet. Phys Rev Lett, 2007, 98: 156103
Lu Y W, Kim C J. Microhand for biological applications. Appl Phys Lett, 2006, 89: 164101
Jager E W H, Inganäs O, Lundström I. Microrobots for micrometer-size objects in aqueous media: potential tools for single-cell manipulation. Science, 2000, 288: 2335–2338
Iwase E, Shimoyama I. Multistep sequential batch assembly of three-dimensional ferromagnetic microstructures with elastic hinges. J Microelectromech Syst, 2005, 14: 1265–1271
Leong T G, Zarafshar A M, Gracias D H. Three-dimensional fabrication at small size scales. Small, 2010, 6: 792–806
Cui A, Li W, Shen T H, Yao Y, et al. Thermally induced shape modification of free-standing nanostructures for advanced functionalities. Sci Rep, 2013, 3: 2429
Utke I. Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications. Oxford: Oxford University Press, 2012
Inkson B J, Dehm G. Thermal stability of Pt nanowires manufactured by Ga+ focused ion beam (FIB). In: Meldrum A, Roorda S, Bernas H, eds. Nanostructuring Materials with Energetic Beams. Warrendale, Pa.: MRS Online Proceedings Library, 2003. 777
Sheldon B W, Lau K H A, Rajamani A. Intrinsic stress, island coalescence, and surface roughness during the growth of polycrystalline films. J Appl Phys, 2001, 90: 5097–5103
Schmidt O G, Eberl K. Nanotechnology: Thin solid films roll up into nanotubes. Nature, 2001, 410: 168
Author information
Authors and Affiliations
Corresponding authors
Rights and permissions
About this article
Cite this article
Cui, A., Hao, T., Li, W. et al. The concept and realization of nanostructure fabrication using free-standing metallic wires with rapid thermal annealing. Sci. China Phys. Mech. Astron. 58, 1–7 (2015). https://doi.org/10.1007/s11433-014-5623-x
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11433-014-5623-x