Abstract
Ion implantation is one of the most competitive methods for the fabrication of optical waveguide structures in optoelectronic materials. Tb3+-doped aluminum borosilicate glass has been demonstrated to be a type of magneto-optical glass with high Verdet constant. In this work, the proton implantation technique with energies of (500 + 550) keV and fluences of (1.0 + 2.0) × 1016 ions/cm2 is performed to form planar waveguides in the Tb3+-doped aluminum borosilicate glass. The guiding modes of the fabricated waveguide were measured by the prism-coupling method at wavelengths of 632.8 and 1539 nm. The near-field light intensity distribution was measured by the end-face coupling method at the wavelength of 632.8 nm and calculated by the finite-difference beam propagation method at both 632.8 and 1539 nm. The optical properties of the double-energy proton-implanted magneto-optical glass waveguides show promise for use as multi-functional integrated optical devices in the visible and near-infrared bands.
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References
L.D. Tzuang, K.J. Fang, P. Nussenzveig, S.H. Fan, M. Lipson, “Non-reciprocal phase shift induced by an effective magnetic flux for light”. Nat. Photon 8, 701–705 (2014)
W.V. Parys, B. Moeyersoon, D.V. Thourhout, R. Baets, M. Vanwolleghem, B. Dagens, J. Decobert, O.L. Gouezigou, D. Make, R. Vanheertum, L. Lagae, “Transverse magnetic mode nonreciprocal propagation in an amplifying AlGaInAs/ InP optical waveguide isolator”. Appl. Phys. Lett. 88, 071115 (2006)
S. Ghosh, S. Keyvavinia, W. Van Roy, T. Mizumoto, G. Roelkens, R. Baets, “Ce:YIG/Silicon-on-Insulator waveguide optical isolator realized by adhesive bonding”. Opt. Express 20, 1839–1848 (2012)
T. Mizumoto, Y. Shoji, R. Takei, “Direct wafer bonding and its application to waveguide optical isolators”. Mater. 5, 985–1004 (2012)
H. DÖtsch, N. Bahlmann, O. Zhuromskyy, M. Hammer, L. Wilkens, R. Gerhardt, P. Hertel, A.F. Popkov, “Applications of magneto-optical waveguides in integrated optics: review”. J. Opt. Soc. Am. B 22, 240–253 (2005)
T. Shih, R.R. Gattass, C.R. Mendonca, E. Mazur, “Faraday rotation in femtosecond laser micromachined waveguides”. Opt. Express 15, 5809–5814 (2007)
E. Pross, H. Dammann, W. Tolksdorf, “Light guidance and mode conversion in magneto optic buried channel waveguides”. J. Appl. Phys. 68, 3849–3855 (1990)
A. Hocini, M. Bouras, H. Amata, “Theoretical investigations on optical properties of magneto-optical thin film on ion-exchanged glass waveguide”. Opt. Mater 35, 1669–1674 (2013)
H. Akamatsu, K. Fujita, Y. Nakatsuka, S. Murai, K. Tanaka, “Magneto-optical properties of Eu2+-containing aluminoborosilicate glasses with ferromagnetic interactions. Opt. Mater 35, 1997–2000 (2013)
C.B. Pedroso, E. Munin, A. Balbin Villaverde, N. Aranha, V.C. Solano Reynoso, L.C. Barbosa, “Magneto-optical rotation of heavy-metal oxide glasses”. J. of Non-Cryst. Solids 231, 134–142 (1998)
W.N. Li, K.S. Zou, M. Lu, B. Peng, W. Zhao, “Faraday glasses with a large size and high performance”. Int. J. Appl. Ceram. Technol 7, 369–374 (2010)
G. V. Vázquez, R. Valiente, S. Gómez-Salces, E. Flores-Romero, J. Rickards, R. Trejo-Luna, “Carbon implanted waveguides in soda lime glass doped with Yb3+ and Er3+ for visible light emission”. Opt. Laser Technol. 79, 132 (2016)
P.J. Burnett, T.F. Page, “An investigation of ion implantation-induced near-surface stresses and their effects in sapphire and glass”. J. Mater. Sci 20, 4624–4646 (1985)
P.D. Townsend, P.J. Chandler, L. Zhang, Optical Effects of Ion Implantation. (Cambridge University Press, Cambridge, 1994)
F. Chen, “Micro- and submicrometric waveguiding structures in optical crystals produced by ion beams for photonic applications”. Laser Photon. Rev. 6(5), 622–640 (2012)
C.X. Liu, Y.W. Li, R.L. Zheng, L.L. Fu, L.L. Zhang, H.T. Guo, Z.G. Zhou, W.N. Li, S.B. Lin, W. Wei, “Optical waveguides in magneto-optical glasses fabricated by proton implantation”. Opt. Laser Technol. 85, 55–59 (2016)
J.F. Ziegler, “SRIM-The stop** and range of ions in matter”, http://www.srim.org
I. Bányász, Z. Zolnai, M. Fried, S. Berneschi, S. Pelli, G. Nunzi-Conti, “Leaky mode suppression in planar optical waveguides written in Er:TeO2-WO3 glass and CaF2 crystal via double energy implantation with MeV N+ ions”. Nucl. Instrum. Methods Phys. Res. B 326, 81–85 (2014)
F. Chen, “Photonic guiding structures in lithium niobate crystals produced by energetic ion beams”. J. Appl. Phys. 106(8), 081101 (2009)
P.J. Chandler, F.L. Lama, “A new approach to the determination of planar waveguide profiles by means of a nonstationary mode index calculation”. Opt. Acta 33, 127–143 (1986)
R. Ramponi, R. Osellame, M. Marangoni, “Two straightforward methods for the measurement of optical losses in planar waveguides”. Rev. Sci. Instrum. 73, 1117–1121 (2002)
Y. Tan, J. R. Vázquez de Aldana, F. Chen, “Femtosecond laser written lithium niobate waveguide laser operating at 1085 nm”. Opt. Eng. 53, 107109 (2014)
Rsoft Design Group, Computer software BeamPROP version 8.0, http://www.rsoftdesign.com
Acknowledgements
This work was financially supported by the National Natural Science Foundation of China (Grant Nos. 11405041 and 61177084), and NUPTSF (Grant No. NY214159), and Research Center of Optical Communications Engineering & Technology, Jiangsu Province (Grant No. ZSF0401).
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Chun-**ao Liu and **ao-Liang Shen these authors contributed equally to this work.
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Liu, CX., Shen, XL., Zheng, RL. et al. Visible and near-infrared waveguides formed by double-energy proton implantation in magneto-optical glasses. Appl. Phys. B 123, 56 (2017). https://doi.org/10.1007/s00340-017-6644-8
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DOI: https://doi.org/10.1007/s00340-017-6644-8