Abstract
This chapter gives a comprehensive explanation about the management of hazardous chemicals in IC production lines. Hazardous chemicals are under specific management systems following the state’s regulations. All five procedures of procurement, transportation, storage, usage, and disposal of hazardous chemicals require professional and licensed personnel with clear responsibilities. Safety management, such as the education of safety and health information, marking safety labels on special designed tools and equipment with compliant handling methods, should be thoroughly implemented. Reliable hazardous chemical management needs close collaboration from the fab staffs and third-party suppliers; it’s critical to carefully follow every procedure.
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© 2024 Publishing House of Electronics Industry
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**ao, D. (2024). Hazardous Chemicals Management. In: Wang, Y., Chi, MH., Lou, J.JC., Chen, CZ. (eds) Handbook of Integrated Circuit Industry. Springer, Singapore. https://doi.org/10.1007/978-981-99-2836-1_32
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DOI: https://doi.org/10.1007/978-981-99-2836-1_32
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Publisher Name: Springer, Singapore
Print ISBN: 978-981-99-2835-4
Online ISBN: 978-981-99-2836-1
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