Abstract
Acoustic emission (AE) monitoring in laser micro-/nanofabrication detects audible or ultrasonic emissions generated during laser processing of materials. This chapter introduces the physical phenomena of laser-generated acoustic emission signals with pulsed lasers in the thermoelastic and the ablative regimes. AE detection methods, including the use of wideband microphones, piezoelectric AE transducers, acoustic mirror/nozzles, interferometer, and optical microphones, are presented. A data processing approach, K-means clustering analysis, is introduced, which can be used to reveal the underlying information from raw AE signals to understand the status of the laser-material interaction processes. Typical applications of AE monitoring during laser micro-/nanofabrication processes are presented, which show that AE monitoring techniques are suitable for detecting defects, focus positions, and laser ablation rates in real time during the laser fabrication processes.
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Wei, C., Li, L. (2020). Acoustic Emission and Ultrasound Monitoring in Laser Micro/Nanofabrication. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-69537-2_47-1
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