Alumina Thin Films

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Abstract

This chapter gives an overview over preparation, properties, and applications of alumina thin films. The preparation of polymeric and colloidal alumina sols and their deposition on diverse substrate materials with different geometries are described first. Consideration of properties (surface tension, particle size, viscosity, aging of the sols, and their optimization by using certain additives) is included, too. A description of posttreatments of the coatings, which initiate phase transformations and also determine their microstructure, completes the part on coating preparation. Data on adhesion, thickness, surface roughness, and mechanical, textural as well as optical properties of alumina thin films are provided in a further paragraph. In a third main part, experience concerning possible applications, such as (i) membranes for catalysis, separation, and filtration, (ii) barrier layers against electrochemical and high-temperature corrosion or interdiffusion of ions between different phases, (iii) mechanical protection, (iv) sensor construction, (v) improvement of optical properties, as well as (vi) achieving water repellency, is summarized.

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References

  • Adraider Y, Pang YX, Nabhani F, Hodgson SN, Zhang ZY. Laser-induced deposition of sol-gel alumina coating on stainless steel under wet condition. Surf Coat Technol. 2011;205:5345–9.

    CAS  Google Scholar 

  • Adraider Y, Hodgson SNB, Sharp MC, Zhang ZY, Nabhani F, Al-Waidh A, Pang YX. Structure characterization and mechanical properties of crystalline alumina coatings on stainless steel fabricated via sol-gel technology and fibre laser processing. J Eur Ceram Soc. 2012;32:4229–40.

    CAS  Google Scholar 

  • Adraider Y, Pang YX, Nabhani F, Hodgson SN, Sharp MC, Al-Waidh A. Laser-induced deposition of alumina ceramic coating on stainless steel from dry thin films for surface modification. Ceram Int. 2014;40:6151–6.

    CAS  Google Scholar 

  • Agrafiotis C, Tsetsekou A. Deposition of meso-porous γ-alumina coatings on ceramic honeycombs by sol-gel methods. J Eur Ceram Soc. 2002;22:423–34.

    CAS  Google Scholar 

  • Ahmad AL, Leo CP, Shukor SRA. Preparation of γ-alumina thin layer with bimodal pore size distribution for diminution of transport resistance in bi-layered membrane. Thin Solid Films. 2008;516:4319–24.

    CAS  Google Scholar 

  • Ahmad NA, Leo CP, Ahmad AL. Synthesis of superhydrophobic alumina membrane: effects of sol-gel coating, steam im**ement and water treatment. Appl Surf Sci. 2013;284:556–64.

    CAS  Google Scholar 

  • Al-Atia MH. Develo** the alumina sol-gel coating for steel oxidation protection at high temperatures. Eng Tech J. 2014;32:744–58.

    Google Scholar 

  • Al-Nakoua MA, El-Naas MH, Abu-Jdayil B. Characterization and testing of sol-gel catalysts prepared as thin layers in a plate reactor. Fuel Process Technol. 2011;92:1836–41.

    CAS  Google Scholar 

  • Alongi J, Ciobanu M, Malucelli G. Thermal stability, flame retardancy and mechanical properties of cotton fabrics treated with inorganic coatings synthesized through sol-gel process. Carbohydr Polym. 2012;87:2093–9.

    CAS  Google Scholar 

  • Alongi J, Carosio F, Malucelli G. Current emerging techniques to impart flame retardancy to fabrics: an overview. Polym Degrad Stab. 2014;106:138–49.

    CAS  Google Scholar 

  • Assih T, Ayral A, Abenoza M, Phalippou J. Raman study of alumina gels. J Mater Sci. 1988;23:3326–31.

    CAS  Google Scholar 

  • ASTM D3359, Standard test methods for measuring adhesion by tape test. ASTM International, West Conshohocken, Pennsylvania; 2009.

    Google Scholar 

  • ASTM D3363, Standard test method for film hardness by pencil test. ASTM International, West Conshohocken, Pennsylvania; 2011.

    Google Scholar 

  • ASTM D4145, Standard test method for coating flexibility of prepainted sheet. ASTM International, West Conshohocken, Pennsylvania; 2010.

    Google Scholar 

  • ASTM D4541, Standard test method for pull-off strength of coatings using portable adhesion testers. ASTM International, West Conshohocken, Pennsylvania; 2009.

    Google Scholar 

  • ASTM D6677, Standard test method for evaluating adhesion by knife. ASTM International, West Conshohocken, Pennsylvania; 2007.

    Google Scholar 

  • Atakan B, Eckert C, Pflitsch C. Light emitting diode excitation of Cr3+:Al2O3 as thermographic phosphor: experiments and measurement strategy. Meas Sci Technol. 2009;20:075304 (9 pp).

    Google Scholar 

  • Avci N, Smet PF, Lauwaert J, Vrielinck H, Poelman D. Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique. J Sol-Gel Sci Technol. 2011a;59:327–33.

    CAS  Google Scholar 

  • Avci N, Cimieri I, Smet PF, Poelman D. Stability improvement of moisture sensitive CaS:Eu2+ micro-particles by coating with sol-gel alumina. Opt Mater. 2011b;33:1032–5.

    CAS  Google Scholar 

  • Bahlawane N. Novel sol-gel process depositing α-Al2O3 for the improvement of graphite oxidation resistance. Thin Solid Films. 2001;396:126–30.

    CAS  Google Scholar 

  • Barbé CJ, Cassidy DJ, Triani G, Latella BA, Mitchell DRG, Bartlett JR. Low temperature bonding of ceramics by sol-gel processing. J Sol-Gel Sci Technol. 2003;26:1145–50.

    Google Scholar 

  • Belleville PF, Floch HG. A new room-temperature deposition technique for optical coatings. J Sol-Gel Sci Technol. 1994;3:23–9.

    CAS  Google Scholar 

  • Benkreira H. The effect of substrate roughness on air entrainment in dip coating. Chem Eng Sci. 2004;59:2745–51.

    CAS  Google Scholar 

  • Bi S, Wang C, Cao Q, Zhang C. Studies on the mechanism of hydrolysis and polymerization of aluminium salts in aqueous solution: correlations between the “Core-links” model and “Cage-like” Keggin Al13 model. Coord Chem Rev. 2004;248:441–55.

    CAS  Google Scholar 

  • Birnie III DP. Surface skin development and rupture during sol-gel spin-coating. J Sol-Gel Sci Technol. 2004;31:225–8.

    CAS  Google Scholar 

  • Biswas RG, Woodhead JL, Bhattacharaya AK. Corrosion studies of inorganic sol-gel coatings on 316 stainless steel. J Mater Sci Lett. 1997;16:1628–33.

    CAS  Google Scholar 

  • Brinker CJ, Hurd AJ. Fundamentals of sol-gel dip coating. J Phys III France. 1994;4:1231–42.

    Google Scholar 

  • Brinker CJ, Frye GC, Hurd AJ, Ashley CS. Fundamentals of sol-gel dip coating. Thin Solid Films. 1991;201:97–108.

    CAS  Google Scholar 

  • Caiut JMA, Nakagaki S, De Lima OJ, Mello C, Leite CAP, Nassar EJ, Ciuffi KJ, Sacco HC. Encapsulation of tetraazaannulenato compounds in matrix by sol-gel process. J Sol-Gel Sci Technol. 2003;28:57–64.

    CAS  Google Scholar 

  • Caldarelli A, Raimondo M, Veronesi F, Boveri G, Guarini G. Sol-gel route for the building up of superhydrophobic nanostructured hybrid-coatings on copper surfaces. Surf Coat Technol. 2015;276:408–15.

    CAS  Google Scholar 

  • Cebollada PAR, Garcia-Bordejé E. Optimisation of physical properties of γ-alumina coating microreactors used for the growth of a carbon nanofiber layer. Chem Eng J. 2009;149:447–54.

    CAS  Google Scholar 

  • Chen Y, ** L, **e Y. Sol-gel processing of organic-inorganic nanocomposite protective coatings. J Sol-Gel Sci Technol. 1998;13:735–8.

    CAS  Google Scholar 

  • Chen Y, Ai X, Huang C. Preparation of alpha alumina coating on carbide tools. Mater Sci Eng. 2000a;B77:221–8.

    CAS  Google Scholar 

  • Chen Y-C, Ai X, Huang C-Z, Wang B-Y. Preparation of α-alumina coated carbide tools by the sol-gel process. Mater Sci Eng A. 2000b;288:19–25.

    Google Scholar 

  • Chen X, Hu Y, Wilson GS. Glucose microbiosensor based on alumina sol-gel matrix/electropolymerized composite membrane. Biosens Bioelectron. 2002;17:1005–13.

    CAS  Google Scholar 

  • Chui-Sabourin M, Garofalini SH. Effect of substrate on crystallization of sol-gel coating. Thin Solid Films. 1991;198:177–90.

    CAS  Google Scholar 

  • Cooper CA, Lin YS. Microstructural and gas separation properties of CVD modified mesoporous γ-alumina membranes. J Membr Sci. 2002;195:35–50.

    CAS  Google Scholar 

  • Cregan V, O’Brien SBG. A note on spin-coating with small evaporation. J Colloid Interface Sci. 2007;314:324–8.

    CAS  Google Scholar 

  • Cristiani C, Grossale A, Forzatti P. Study of the physic-chemical characteristics and rheological behavior of boehmite dispersions for dip-coating applications. Top Catal. 2007;42– 43:455–9.

    Google Scholar 

  • Das N, Maiti HS. Ceramic membrane by tape casting and sol-gel coating for microfiltration and ultrafiltration application. J Phys Chem Solids. 2009;70:1395–400.

    CAS  Google Scholar 

  • Das S, Pal P, Roy S, Chakraboarty S, Biswas PK. 3-D map** with ellipsometrically determined physical thickness/refractive index of spin coated sol-gel silica layer. Bull Mater Sci. 2002;25:557–60.

    CAS  Google Scholar 

  • De Visschere P, Vanbesien K. Capacitance spectroscopy of alumina sol-gel capacitors with Al top contacts. J Sol-Gel Sci Technol. 2008;45:225–35.

    Google Scholar 

  • De G, Bhattacharyya S. Au nanoparticles in alumina sols and coatings. J Mater Chem. 2008;18:2816–24.

    CAS  Google Scholar 

  • Ding DY, Rao JC, Wang DZ, Ma ZY, Geng L, Yao CK. Sol-gel alumina coatings for whisker reinforced metal matrix composites. Mater Sci Eng. 2000a;A279:138–41.

    CAS  Google Scholar 

  • Ding DY, Wang DZ, Zhang WL, Yao CK, Rao JC, Li DX. Interfacial reactions and mechanical properties of 6061Al matrix composites reinforced with alumina-coated Al18B4O33 whiskers. Mater Lett. 2000b;45:6–11.

    CAS  Google Scholar 

  • Djošić MS, Mišković-Stanković VB, Janaćković DT, Kačarević ZM, Petrović RD. Electrophoretic deposition of boehmite coatings on titanium substrate. Colloids Surf A. 2006;274:185–91.

    Google Scholar 

  • Dou P, Kasada R. Preliminary study on nano- and micro-composite sol-gel based alumina coatings on structural components of lead-bismuth eutectic cooled fast breeder reactors. J Nucl Mater. 2011;409:177–82.

    CAS  Google Scholar 

  • Douy A, Odier P. The polyacrylamide gel: a novel route to ceramic and glassy oxide powders. Mater Res Bull. 1989;24:1119–26.

    CAS  Google Scholar 

  • Dressler M, Nofz M, Gemeinert M. Rheology, UV-vis transparency and particle size of modified Yoldas sols. J Sol-Gel Sci Technol. 2006;38:261–9.

    CAS  Google Scholar 

  • Dressler M, Nofz M, Malz F, Pauli J, Jäger C, Reinsch S, Scholz G. Aluminium speciation and thermal evolution of aluminas resulting from modified Yoldas sols. J Solid State Chem. 2007;180:2409–19.

    CAS  Google Scholar 

  • Dressler M, Nofz M, Dörfel I, Saliwan-Neumann R. Influence of sol-gel derived alumina coatings on oxide scale growth of nickel-base superalloy Inconel-718. Surf Coat Technol. 2008a;202:6095–102.

    CAS  Google Scholar 

  • Dressler M, Nofz M, Saliwan-Neumann R, Dörfel I, Griepentrog M. Sol-gel derived alumina layers on nickel-base superalloy Inconel-718 (IN-718). Thin Solid Films. 2008b;517:786–92.

    CAS  Google Scholar 

  • Dressler M, Nofz M, Klobes P, Dörfel I, Reinsch S. Differences between films and monoliths of sol-gel derived aluminas. Thin Solid Films. 2010;519:42–51.

    CAS  Google Scholar 

  • Dressler M, Nofz M, Dörfel I, Saliwan-Neumann R. Diffusion of Cr, Fe, and Ti ions from Ni-base alloy Inconel-718 into a transition alumina coating. Thin Solid Films. 2012;520:4344–9.

    CAS  Google Scholar 

  • Du YJ, Damron M, Tang G, Zheng H, Chu C-J, Osborne JH. Inorganic/organic hybrid coatings for aircraft aluminium alloy substrates. Prog Org Coat. 2001;41:226–32.

    Google Scholar 

  • Durán A, Castro Y, Conde A, de Damborenea JJ. Sol-gel protective coatings for metals. In: Sakka S, editor. Handbook of sol-gel science and technology, vol. III. Kluver Academic Publishers, Boston-Dordrecht-London; 2005, Chapter 19.

    Google Scholar 

  • Eckert C, Pflitsch C, Atakan B. Sol-gel deposition of multiply doped thermographic phosphor coatings Al2O3:Cr3+, M3+) (M = Dy, Tm) for wide range surface temperature measurement application. Prog Org Coat. 2010;67:116–9.

    CAS  Google Scholar 

  • EN 1071-3, Advanced technical ceramics – methods of test of ceramic coatings – part 3: determination of adhesion and other mechanical failure modes by a scratch test. Beuth, Berlin-Wien-Zürich; 2005.

    Google Scholar 

  • EN ISO 4287, Geometrical Product Specifications (GPS) – surface texture: profile method – terms, definitions and surface texture parameters. Beuth, Berlin-Wien-Zürich; 1998.

    Google Scholar 

  • Feigl M, Nofz M, Sojref R, Kohl A. Improved wetting of bare and pre-coated steels by aqueous alumina sols for optimum coating success. J Sol-Gel Sci Technol. 2010;55:191–8.

    CAS  Google Scholar 

  • Felde B, Mehner A, Kohlscheen J, Gläbe R, Hoffmann F, Mayr P. Deposition of alumina coatings on monocrystalline diamonds by sol-gel techniques. Diam Relat Mater. 2001;10:515–8.

    CAS  Google Scholar 

  • Feng L, Li H, Song Y, Wang Y. Formation process of a strong water-repellent alumina surface by the sol-gel method. Appl Surf Sci. 2010;256:3191–6.

    CAS  Google Scholar 

  • Feng L, Liu Y, Zhang H, Wang Y, Qiang X. Superhydrophobic alumina surface with high adhesive force and long-term stability. Colloids Surf A. 2012;410:66–71.

    CAS  Google Scholar 

  • Floch HG, Priotton J-J, Thomas IM. Optical coatings prepared from colloidal media. Thin Solid Films. 1989;175:173–8.

    CAS  Google Scholar 

  • Giani L, Cristiani C, Groppi G, Tronconi E. Washcoating method for Pd/γ-Al2O3 deposition on metallic foams. Appl Catal B Environ. 2006;62:121–31.

    CAS  Google Scholar 

  • Guido E, Alongi J, Colleoni C, Di Blasio A, Carosio F, Verelst M, Malucelli G, Rosace G. Thermal stability and flame retardancy of polyester fabrics sol-gel treated in the presence of boehmite nanoparticles. Polym Degrad Stab. 2013;98:1609–16.

    CAS  Google Scholar 

  • Gündüz B, Cavaş M, Yakuphanoğlu F. Production of Al2O3 thin films for FET and MOSFET transistor gate applications. 6th international advanced technologies symposium (IATS’11); 2011 May 16–18, Elaziğ. http://web.firat.edu.tr/iats/cd/subjects/Metallurgy%26Material/MSM-119.pdf

  • Guo W, Lu H, Hu N. Comparative bioelectrochemical study of two types of myoglobin layer-by-layer films with alumina: vapor-surface sol-gel deposited Al2O3 films versus Al2O3 nanoparticle films. Electrochim Acta. 2006;52:123–32.

    CAS  Google Scholar 

  • Han L, Karthikeyan KG, Anderson MA, Wouters JJ, Gregory KB. Mechanistic insights into the use of oxide nanoparticles coated asymmetric electrodes for capacitive deionization. Electrochim Acta. 2013;90:573–81.

    CAS  Google Scholar 

  • Hawthorne HM, Neville A, Troczynski T, Hu X, Thammachart M, **e Y, Fu J, Yang Q. Characterization of chemically bonded composite sol-gel based alumina coatings on steel substrates. Surf Coat Technol. 2004;176:243–52.

    CAS  Google Scholar 

  • Heinonen S, Huttunen-Saarivirta E, Nikkanen J-H, Raulio M, Priha O, Laakso J, Storgårds E, Levänen E. Antibacterial properties and chemical stability of superhydrophobic silver-containing surface produced sol-gel route. Colloids Surf A. 2014;453:149–61.

    CAS  Google Scholar 

  • Horowitz F, Michels AF, Yeatman EM. Optical viscometry of spinning sol coatings. J Sol-Gel Sci Technol. 1998;13:707–12.

    CAS  Google Scholar 

  • Hu H, **ao W, Yuan J, Shi J, He D, Shangguan W. High photocatalytic activity and stability for decomposition of gaseous acetaldehyde on TiO2/Al2O3 composite films coated on foam nickel substrates by sol-gel processes. J Sol-Gel Sci Technol. 2008;45:1–8.

    CAS  Google Scholar 

  • Hu B, Yao M, Yang P, Shan W, Yao X. Preparation and dielectric properties of dense and amorphous alumina film by sol-gel technology. Ceram Int. 2013;309:7613–8.

    Google Scholar 

  • Hu B, Yao M, **ao R, Chen J, Yao X. Optical properties of amorphous Al2O3 thin films prepared by a sol-gel process. Ceram Int. 2014;40:14133–9.

    CAS  Google Scholar 

  • Hübert T, Svoboda S, Oertel B. Wear resistant alumina coatings produced by a sol-gel process. Surf Coat Technol. 2006a;201:487–91.

    Google Scholar 

  • Hübert T, Schwarz J, Oertel B. Sol-gel alumina coatings on stainless steel for wear protection. J Sol-Gel Sci Technol. 2006b;38:179–84.

    Google Scholar 

  • Hwang S, Kwon OJ, Kim JJ. Method of catalyst coating in micro-reactors for methanol steam reforming. Appl Catal A Gen. 2007;316:83–9.

    CAS  Google Scholar 

  • Idrissi-Kandri N, Ayral A, Guizard C, El Ghadraoui EH, Cot L. Synthesis, characterization and first application of new alumina hydrosols. Mater Lett. 1999;40:52–8.

    CAS  Google Scholar 

  • Ienei E, Milea AC, Duta A. Influence of spray pyrolysis deposition parameters on the optical properties of porous alumina films. Energy Procedia. 2014;48:97–104.

    CAS  Google Scholar 

  • Islam T, Kumar L, Khan SA. A novel sol-gel thin film porous alumina based capacitive sensor for measuring trace moisture in the range of 2.5–25 ppm. Sensors Actuators B Chem. 2012;173:377–84.

    CAS  Google Scholar 

  • ISO 4624, Paints and varnishes – pull-off test for adhesion. Beuth, Berlin-Wien-Zürich; 2002.

    Google Scholar 

  • Jia J, Zhou J, Zhang J, Yuan Z, Wang S. The influence of preparative parameters on the adhesion of alumina washcoats deposited on metallic supports. Appl Surf Sci. 2007;253:9099–104.

    CAS  Google Scholar 

  • **g C, Zhao X, Tao H. An approach to predict the solid film thickness possibly yielded from an alumina sol-gel liquid film. Surf Coat Technol. 2006;201:2655–61.

    CAS  Google Scholar 

  • **g C, Xu X, Hou J. Preparation of compact Al2O3 film on metal for oxidation resistance by polyvinylpyrrolidone. J Sol-Gel Sci Technol. 2007a;43:321–7.

    CAS  Google Scholar 

  • **g C, Zhao X, Zhang Y. Sol-gel fabrication of compact, crack-free alumina film. Mater Res Bull. 2007b;42:600–8.

    CAS  Google Scholar 

  • **g C, Zhao X, Zhang Y. Elimination of a zero-growth in thickness of Al2O3 protective film deposited by cycles of dip-coating method. J Sol-Gel Sci Technol. 2007c;42:151–6.

    CAS  Google Scholar 

  • JIS K 5400 Testing method for paints, Japanese Standards Association; 1990.

    Google Scholar 

  • Jung Y-I, Kim H-G, Park J-Y, Park D-J, Park J-H. Effect of heat treatment on phase formation and crystallization of sol-gel derived Al2O3, ZrO2-Y2O3, and Ta2O5. J Asian Ceram Soc. 2015;3:217–20.

    Google Scholar 

  • Kákoš J, Bača L, Veis P, Pach L. Photoluminescence spectra and crystallization of θ-Al2O3 and α-Al2O3 from AlOOH-Fe(NO3)3 gels. J Sol-Gel Sci Technol. 2001;21:167–72.

    Google Scholar 

  • Kheirollahi I, Abdellahi M, Emamalizadeh M, Sharifi H. Preparation and characterization of multilayer mesoporous alumina nao membrane via sol-gel method using new precursors. Ceram Int. 2015;41:15083–8.

    CAS  Google Scholar 

  • Kim H, Troczynski T. Thick alumina dielectric films on aluminium through chemically bonded composite sol-gel. Ceram Int. 2007;33:333–6.

    CAS  Google Scholar 

  • Kim S-H, Kim C-E, Oh Y-J. Influence of Al2O3 diffusion barrier and PBTiO3 seed layer on microstructural and ferroelectric characteristics of PZT thin films by sol-gel spin coating method. Thin Solid Films. 1997;305:321–6.

    CAS  Google Scholar 

  • Kim H, Chen M, Yang Q, Troczynski T. Sol-gel alumina environmental barrier coatings for SiC grit. Mater Sci Eng A. 2006;420:150–4.

    Google Scholar 

  • Kozuka H, Ishikawa Y, Ashibe N. Radiative striations of spin-coating films: surface roughness measurement and in-situ observation. J Sol-Gel Sci Technol. 2004;31:245–8.

    CAS  Google Scholar 

  • Krivoshapkin PV, Mikhaylov VI, Krivoshapkina EF, Zaikovskii VI, Melgunov MS, Stalugin VV. Mesoporous Fe-alumina films prepared via sol-gel route. Micropor Macropor Mater. 2015;204:276–81.

    CAS  Google Scholar 

  • Krivoshapkina EF, Petrakov AP, Krivoshapkin PV, Zubavichos YV, Melgunov MS. Small-angle scattering of synchrotron radiation investigations of nanostructured alumina membranes synthesized by sol-gel method. J Sol-Gel Sci Technol. 2013;68:488–94.

    CAS  Google Scholar 

  • Krozel JW, Palazoglu AN, Powell RL. Experimental observation of dip-coating phenomena and the prospect of using motion control to minimize fluid retention. Chem Eng Sci. 2000;55:3639–50.

    CAS  Google Scholar 

  • Langlet M. Ultrasonic pulverization of an aerosol: a versatile tool for the deposition of sol-gel thin films. In: Sakka S, editor. Handbook of sol-gel science and technology, vol. I. Kluver Academic Publishers, Boston-Dordrecht-London; 2005, Chapter 13.

    Google Scholar 

  • Liu Z, Liu B, Zhang M, Kong J, Deng J. Al2O3 sol-gel derived amperometric biosensor for glucose. Anal Chim Acta. 1999;392:135–41.

    CAS  Google Scholar 

  • Liu Z, Deng J, Ding L. A new tyrosinase biosensor based on tailoring the porosity of Al2O3 sol-gel to co-immobilize tyrosinase and the mediator. Anal Chim Acta. 2000;407:87–96.

    CAS  Google Scholar 

  • Liu L, Wang X, Li H, Chen L, Huang X. Al2O3-coated LiCoO2 as cathode material for lithium ion batteries. Solid State Ion. 2002;152–153:341–6.

    Google Scholar 

  • Luo L, Yao J, Li J, Yu J. Preparation and characterization of sol-gel Al2O3/Ni-P composite coatings on carbon steel. Ceram Int. 2009;35:2741–5.

    CAS  Google Scholar 

  • MacKenzie KJD, Temuu** J, Smith ME, Angerer P, Kameshima Y. Effect of mechanochemical activation on the thermal reactions of boehmite (γ-AlOOH) and γ-Al2O3. Thermochim Acta. 2000;359:87–94.

    CAS  Google Scholar 

  • Malenovska M, Neouze M-A, Schubert U, Monnier V, Scolan E, Pugin R. Defect-free nanostructured alumina coating doped with noble metal nanoparticles. Appl Surf Sci. 2009;256S:S9–11.

    Google Scholar 

  • Mange F, Fauchadour D, Barré L, Normand L, Rouleau L. A microstructural investigation of nanostructured boehmite films prepared by the sol-gel route. Colloids Surf A. 1999;155:199–210.

    CAS  Google Scholar 

  • Marsal A, Ansart F, Turq V, Bonino JP, Sobrino JM, Chen YM, Garcia J. Mechanical properties and tribological behavior of a silica or/and alumina coating prepared by sol-gel route on stainless steel. Surf Coat Technol. 2013;237:234–40.

    CAS  Google Scholar 

  • Matsuda A, Tatsumisago M. Electrophoretic sol-gel deposition. In: Sakka S, editor. Handbook of sol-gel science and technology, vol. I. Kluver Academic Publishers, Boston-Dordrecht-London; 2005, Chapter 14.

    Google Scholar 

  • Miki T, Nishizawa K, Suzuki K, Kato K. Microstructure control of porous alumina film using aqueous sol containing poly(ethylene glycol). J Electroceram. 2007;21:524–7.

    Google Scholar 

  • Mitra A, Jana D, De G. Facile synthesis of hexagonally ordered mesoporous aluminium oxide thin films with high catalytic activity. Microporous Mesoporous Mater. 2012;158:187–94.

    CAS  Google Scholar 

  • Morgado Jr E, Lam YL, Menezes SMC, Nazar LF. Characterization of peptized boehmite systems: an 27Al nuclear magnetic resonance study. J Colloid Interface Sci. 1995;176:432–41.

    CAS  Google Scholar 

  • Morgado Jr E, Lam YL, Nazar LF. Formation of peptizable boehmites by hydrolysis of aluminium nitrate in aqueous solution. J Colloid Interface Sci. 1997;188:257–69.

    CAS  Google Scholar 

  • Murali KR, Thirumoorthy P. Characteristics of sol-gel deposited alumina films. J Alloys Compd. 2010;500:93–5.

    CAS  Google Scholar 

  • Musić S, Dragčević D, Popović S, Vdović N. Chemical and microstructural properties of Al-oxide phases obtained from AlCl3 solutions in alkaline medium. Mater Chem Phys. 1999;59:12–9.

    Google Scholar 

  • Nitta SV, Jain A, Wayner Jr PC, Gill WN, Plawsky JL. Effect of sol-gel rheology on the uniformity of spin-on xerogel films. J Appl Phys. 1999;86:5870–8.

    CAS  Google Scholar 

  • Nofz M, Stösser R, Scholz G, Dörfel I, Schultze D. The thermally induced transformation of pseudoboehmite gels – a comparison of the effects of corundum seeding and iron do**. J Eur Ceram Soc. 2005;25:1095–107.

    CAS  Google Scholar 

  • Nofz M, Pauli J, Dressler M, Jäger C, Altenburg W. 27Al NMR study of Al-speciation in aqueous alumina-sols. J Sol-Gel Sci Technol. 2006;38:25–35.

    CAS  Google Scholar 

  • Nofz M, Dörfel I, Sojref R. Microstructure of sol-gel derived corundum containing coatings. Thin Solid Films. 2007;515:7145–54.

    CAS  Google Scholar 

  • Nofz M, Zietelmann C, Feigl M, Dörfel I, Saliwan NR. Microstructural origin of time-dependent changes in alumina sol-gel coated Inconel 718 exposed to NaCl solution. J Sol-Gel Sci Technol. 2015;75:6–16.

    CAS  Google Scholar 

  • Ohya Y. Aqueous precursors. In: Sakka S, editor. Handbook of sol-gel science and technology, vol. I. Kluver Academic Publishers, Boston-Dordrecht-London; 2005, Chapter 5.

    Google Scholar 

  • Olding T, Sayer M, Barrow D. Ceramic sol-gel composite coatings for electrical insulation. Thin Solid Films. 2001;398–399:581–6.

    Google Scholar 

  • Pan C, Shen L, Shang S, **ng Y. Preparation of superhydrophobic and UV blocking cotton fabric via sol-gel method and self-assembly. Appl Surf Sci. 2012;259:110–7.

    CAS  Google Scholar 

  • Pandey M, Tyagi K, Mishra P, Saha D, Sengupta K, Islam SS. Nanoporous morphology of alumina films prepared by sol-gel dip coating method on alumina substrate. J Sol-Gel Sci Technol. 2012;64:282–8.

    CAS  Google Scholar 

  • Pandey M, Mishra P, Saha D, Sengupta K, Jain K, Islam SS. Nanoporous alumina (γ- and α-phase) gel cast thick film for the development of trace moisture sensor. J Sol-Gel Sci Technol. 2013;68:317–23.

    CAS  Google Scholar 

  • Parola S, Verdenelli M, Sigala C, Scharff J-P, Velez K, Veytizou C, Quinson J-F. Sol-gel coatings on non-oxide planar substrates and fibers: a protection barrier against oxidation and corrosion. J Sol-Gel Sci Technol. 2003;26:803–6.

    CAS  Google Scholar 

  • Partlow DP, Yoldas BE. Colloidal versus polymer gels and monolithic transformation in glass-forming systems. J Non-Cryst Solids. 1981;46:153–61.

    CAS  Google Scholar 

  • Peng P, Li XD, Yuan GF, She WQ, Cao F, Yang DM, Zhuo Y, Liao J, Yang SL, Yue MJ. Aluminium oxide/amorphous carbon coatings on carbon fibers, prepared by pyrolysis of an organic-inorganic hybrid precursor. Mater Lett. 2001;47:171–7.

    CAS  Google Scholar 

  • Pflitsch C, Siddiqui RA, Atakan B. Phosphorescence properties of sol-gel derived ruby measurement as functions of temperature and Cr3+ content. Appl Phys A. 2008a;90:527–32.

    CAS  Google Scholar 

  • Pflitsch C, Siddiqui RA, Eckert C, Atakan B. Sol-gel deposition of chromium doped aluminium oxide films (ruby) for surface temperature sensor application. Chem Mater. 2008b;20:2773–8.

    CAS  Google Scholar 

  • Phani AR, Santucci S. Evaluation of structural and mechanical properties of aluminium oxide thin films deposited by a sol-gel process: comparison of microwave to conventional anneal. J Non-Cryst Solids. 2006;352:4093–100.

    CAS  Google Scholar 

  • Pietrzyk B, Miszczak S, Szymanowski H, Sobczyk-Guzenda A, Gawronski S. Plasma enhanced aerosol-gel method: a new way of preparing ceramic coatings. J Sol-Gel Sci Technol. 2013a;68:455–63.

    CAS  Google Scholar 

  • Pietrzyk B, Miszczak S, Szymanowski H, Kucharsky D. Plasma enhanced aerosol-gel deposition of Al2O3 coatings. J Eur Ceram Soc. 2013b;33:2341–6.

    CAS  Google Scholar 

  • Pillonet-Minardi A, Marty O, Bovier C, Garapon C, Mugnier J. Optical and structural analysis of Eu3+-doped alumina planar waveguides elaborated by the sol-gel process. Opt Mater. 2001;16:9–13.

    Google Scholar 

  • Popa AF, Rossignol S, Kappenstein C. Ordered structure and preferred orientation of boehmite films prepared by the sol-gel method. J Non-Cryst Solids. 2002;306:169–74.

    CAS  Google Scholar 

  • Qin W, Guan K, Lei B, Liu Y, Peng C, Wu J. One-step coating and characterization of α-Al2O3 microfiltration membrane. J Membr Sci. 2015;490:160–8.

    CAS  Google Scholar 

  • Quéré D, de Ryck A, Ramdane O. Liquid coating from a surfactant solution. Europhys Lett. 1997;37:305–10.

    Google Scholar 

  • Radić N, Grbić B, Rožić L, Novaković T, Petrović S, Stoychev D, Stefanov P. Effects of organic additives on alumina coatings on stainless steel obtained by spray pyrolysis. J Non-Cryst Solids. 2011;357:3592–7.

    Google Scholar 

  • Ruhi G, Modi OP, Singh IB, Jha AK, Yegneswaran AH. Wear and electrochemical characterization of sol-gel alumina coating on chemically pre-treated mild steel substrate. Surf Coat Technol. 2006;201:1866–72.

    CAS  Google Scholar 

  • Ruhi G, Modi OP, Sinha ASK, Singh IB. Effect of sintering temperatures on corrosion and wear properties of sol-gel alumina coatings on surface pre-treated mild steel. Corros Sci. 2008;50:639–49.

    CAS  Google Scholar 

  • Ruhi G, Modi OP, Singh IB. Pitting of AISI 304 stainless steel coated with nano structured sol-gel alumina coatings in chloride containing acidic environments. Corros Sci. 2009a;51:3057–63.

    CAS  Google Scholar 

  • Ruhi G, Modi OP, Singh IB. Corrosion behavior of nano structured sol-gel alumina coated 9Cr-1Mo ferritic steel in chloride bearing environment. Surf Coat Technol. 2009b;204:359–65.

    CAS  Google Scholar 

  • Saha D, Das S, Sengupta K. Development of commercial nanoporous trace moisture sensor following sol-gel thin film technique. Sensors Actuators B Chem. 2008;128:383–7.

    CAS  Google Scholar 

  • Saha D, Ghara DK, Pal M. Nanoporous γ-alumina based novel sensor to detect trace moisture in high temperature and high pressure environment. Sensors Actuators B Chem. 2016;222:1043–9.

    CAS  Google Scholar 

  • Schulz W, Nofz M, Feigl M, Dörfel I, Saliwan Neumann R, Kranzmann A. Corrosion of uncoated and alumina coated steel X20CrMoV12-1 in H2O-CO2-O2 and air at 600 °C. Corros Sci. 2013a;68:44–50.

    CAS  Google Scholar 

  • Schulz W, Feigl M, Dörfel I, Nofz M, Kranzmann A. Influence of a sol-gel alumina coating on oxidation of X20CrMoV12-1 in air up to 650 °C. Thin Solid Films. 2013b;539:29–34.

    CAS  Google Scholar 

  • Sehrawat P, Mishra P, Islam SS. Spectroscopic analysis of multi-walled carbon nanotube-alumina composite films: optimization of temperature coefficient of resistance and thermal hysteresis for thermal sensor applications. Mater Sci Semicond Process. 2015;31:116–23.

    CAS  Google Scholar 

  • Seok SI, Kim JH, Choi KH, Hwang YY. Preparation of corrosion protective coatings on galvanized iron from aqueous inorganic-organic hybrid sols by sol-gel method. Surf Coat Technol. 2006;200:3468–72.

    CAS  Google Scholar 

  • Shafiei A, Oprea C, Troczynski T. Effect of porous alumina coatings on decreasing hydrogen damage to Pb(Zr, Ti)O3. Surf Coat Technol. 2013;224:29–33.

    CAS  Google Scholar 

  • Singh IB, Singh M, Das S, Yegneswaran AH. Corrosion behavior of sol-gel Al2O3 coated Al-Si alloy in 3.5% NaCl solution. Indian J Chem Technol. 2010;17:419–24.

    CAS  Google Scholar 

  • Singh IB, Modi OP, Ruhi G. Development of sol-gel alumina coating on 9Cr-1Mo ferritic steel and their oxidation behavior at high temperature. J Sol-Gel Sci Technol. 2015a;74:685–91.

    CAS  Google Scholar 

  • Singh IB, Gupta P, Maheshwari A, Agrawal N. Corrosion resistance of sol-gel alumina coated Mg metal in 3.5% NaCl solution. J Sol-Gel Sci Technol. 2015b;73:127–32.

    CAS  Google Scholar 

  • Song K-H, Kim H-Y, Kim B-M, Lee K-R. Boehmite sol-coated membrane preparation for the separation of aqueous alcohol. Desalination. 2008;234:244–51.

    CAS  Google Scholar 

  • Tadanaga K. Preparation and application of alumina- and titania-nanocrystals dispersed thin films via sol-gel process with hot water treatment. J Sol-Gel Sci Technol. 2006;40:281–5.

    CAS  Google Scholar 

  • Tadanaga K, Katata N, Minami T. Formation process of super-water-repellent Al2O3 coating films with high transparency by the sol-gel method. J Am Ceram Soc. 1997;80:3213–6.

    CAS  Google Scholar 

  • Tadanaga K, Morinaga J, Minami T. Formation of superhydrophobic-superhydrophilic pattern on flowerlike alumina thin film by the sol-gel method. J Sol-Gel Sci Technol. 2000;19:211–4.

    CAS  Google Scholar 

  • Tadanaga K, Kitamuro K, Matsuda A, Minami T. Formation of superhydrophobic alumina coating films with high transparency on polymer substrates by the sol-gel method. J Sol-Gel Sci Technol. 2003;26:705–8.

    CAS  Google Scholar 

  • Tadanaga K, Yamaguchi N, Uraoka Y, Matsuda A, Minami T, Tatsumisago M. Anti-reflective properties of nano-structured alumina thin films on poly(methyl methacrylate) substrates by the sol-gel process with hot water treatment. Thin Solid Films. 2008;516:4526–9.

    CAS  Google Scholar 

  • Tiwari SK, Sahu RK, Pramanick AK, Singh R. Development of conversion coating on mild steel prior to sol gel nanostructured Al2O3 coating for enhancement in corrosion resistance. Surf Coat Technol. 2011;205:4960–7.

    CAS  Google Scholar 

  • Topuz B, Çiftçioğlu M. Sol-gel derived mesoporous and microporous alumina membranes. J Sol-Gel Sci Technol. 2010;56:287–99.

    CAS  Google Scholar 

  • Truyen D, Courty M, Alphonse P, Ansart F. Catalytic coatings on stainless steel prepared by sol-gel route. Thin Solid Films. 2006;495:257–61.

    CAS  Google Scholar 

  • Van Gestel T, Sebold D, Meulenberg WA, Bram M, Buchkremer H-P. Manufacturing of new nano-structured ceramic-metallic composite microporous membranes consisting of ZrO2, Al2O3, TiO2 and stainless steel. Solid State Ion. 2008;179:1360–6.

    Google Scholar 

  • Vasconcelos DCL, Oréfice RL, Vasconcelos WL. Processing, adhesion and electrical properties of silicon steel having non-oriented grains coated with silica and alumina sol-gel. Mater Sci Eng A. 2007;447:77–82.

    Google Scholar 

  • Vasconcelos DCL, Nunes EHM, Vasconcelos WL. AES and FTIR characterization of sol-gel alumina films. J Non-Cryst Solids. 2012;358:1374–9.

    CAS  Google Scholar 

  • Velez K, Quinson JF. Structural characterization by SIMS of alumina coatings on stainless steel. J Sol-Gel Sci Technol. 2000;19:469–72.

    CAS  Google Scholar 

  • Vieira Coelho AC, Rocha GA, Souza Santos P, Souza Santos H, Kiyohara PK. Specific surface area and structures of aluminas from fibrillar pseudoboehmite. Revista Materia 2008;13:329–41

    Google Scholar 

  • Villegas L, Masset F, Guilhaume N. Wet impregnation of alumina-washcoated monoliths: effect of the drying procedure on Ni distribution and on autothermal reforming activity. Appl Catal A Gen. 2007;320:43–55.

    CAS  Google Scholar 

  • Vinogradov VV, Agafonov AV, Vinogradov AV. Superhydrophobic effect of hybrid organo-inorganic materials. J Sol-Gel Sci Technol. 2010;53:312–5.

    CAS  Google Scholar 

  • Vitanov P, Harizanova A, Ivanova T, Dimitrova T. Chemical deposition of Al2O3 thin films on Si substrates. Thin Solid Films. 2009;517:6327–30.

    CAS  Google Scholar 

  • Wang Z, Zeng R. Comparison in characterization of composite and sol-gel coating on AZ31 magnesium alloy. Trans Nonferrous Met Soc China. 2010;20:s665–9.

    CAS  Google Scholar 

  • Wang J, Yang S, Chen M, Xue Q. Preparation and characterization of arachidic acid self-assembled monolayers on glass substrate coated with sol-gel Al2O3 thin film. Surf Coat Technol. 2004;176:229–35.

    CAS  Google Scholar 

  • Wang T, Pu J, Bo C, Jian L. Sol-gel prepared Al2O3 coatings for the application as tritium permeation barrier. Fusion Eng Des. 2010;85:1068–72.

    CAS  Google Scholar 

  • Wang Z, Xu X, Gong J, Ma J, Xu J. Structure and fabry-pérot fringes of polymer-boehmite hybrid thin film by sol-gel dip-coating. J Sol-Gel Sci Technol. 2015;73:154–60.

    CAS  Google Scholar 

  • Wilson S, Hawthorne HM, Yang Q, Troczynski T. Sliding and abrasive wear of composite sol-gel alumina coated Al alloys. Surf Coat Technol. 2000;133–134:389–96.

    Google Scholar 

  • Wilson S, Hawthorne HM, Yang Q, Troczynski T. Scale effects in abrasive wear of composite sol-gel alumina coated light alloys. Wear. 2001;251:1042–50.

    Google Scholar 

  • Wouters JJ, Lado JJ, Tejedor-Tejedor MI, Perez-Roa R, Anderson MA. Carbon fiber sheets coated with thin-films of SiO2 and γ-Al2O3 as electrodes in capacitive deionization: relationship between properties of the oxide films and electrode performance. Electrochim Acta. 2013;112:763–73.

    CAS  Google Scholar 

  • Wu Z, Liu L, Shen B, Zhong C, Hu W. Effect of α-Al2O3 coatings on the mechanical properties of Ni/SiC composites prepared by electrodeposition. Mater Sci Eng A. 2012;556:767–74.

    CAS  Google Scholar 

  • **e Y, Hawthorne HM. Measuring the adhesion of sol-gel derived coatings to a ductile substrate by an indentation-based method. Surf Coat Technol. 2003;172:42–50.

    CAS  Google Scholar 

  • Xu M, Chen Z, Li L, Zhu H, Zhao Q, Xu L, Peng N, Gong L. Highly crystalline alumina surface coating from hydrolysis of aluminium isopropoxide on lithium-rich layered oxide. J Power Sources. 2015;281:444–54.

    CAS  Google Scholar 

  • Yamaguchi N, Tadanaga K, Matsuda A, Minami T, Tatsumisago M. Anti-reflective coatings of flowerlike alumina on various glass substrates by the sol-gel process with the hot water treatment. J Sol-Gel Sci Technol. 2005;33:117–20.

    CAS  Google Scholar 

  • Yamaguchi N, Tadanaga K, Matsuda A, Minami T, Tatsumisago M. Formation of anti-reflective alumina films on polymer substrates by the sol-gel process with hot water treatment. Surf Coat Technol. 2006;201:3653–7.

    CAS  Google Scholar 

  • Yamaguchi N, Tadanaga K, Matsuda A, Minami T, Tatsumisago M. Antireflective properties of flowerlike alumina thin film on soda-lime silica glass substrates prepared by the sol-gel method with hot water treatment. Thin Solid Films. 2007;515:3914–7.

    CAS  Google Scholar 

  • Yang P, Yao M, **ao R, Chen J, Yao X. Preparation of Al2O3 film by sol-gel method on thermally evaporated Al film. Vacuum. 2014;107:112–5.

    CAS  Google Scholar 

  • Yao M, Shan W. Dielectric behavior of alumina thin film under high DC electric field prepared by sol-gel method. J Adv Dielectr. 2013;3:1350017 (5 pages).

    Google Scholar 

  • Yao M, ** on the electric properties of amorphous alumina films prepared by sol-gel technology. J Sol-Gel Sci Technol. 2015;74:39–44.

    CAS  Google Scholar 

  • Yarbrough WA, Roy R. Microstructural evolution in sintering AlOOH gels. J Mater Res. 1987;2:494–515.

    CAS  Google Scholar 

  • Yoldas BE. A transparent porous alumina. Ceram Bull. 1975a;54:286–8.

    CAS  Google Scholar 

  • Yoldas BE. Alumina sol preparation from alkoxides. Ceram Soc. 1975b;54:289–90.

    CAS  Google Scholar 

  • Yoldas BE. Alumina gels that form porous transparent Al2O3. J Mater Sci. 1975c;10:1856–60.

    CAS  Google Scholar 

  • Yoldas BE. Design of sol-gel coating media for ink-jet printing. J Sol-Gel Sci Technol. 1998;13:147–52.

    CAS  Google Scholar 

  • Yuan Q, Zhang X, Wang Z, Shibraen MHMA, Yang S, Xu J. Dimerization of rhodamine B in alumina sol and corresponding dip-coated film. Colloids Surf A. 2015;486:139–44.

    CAS  Google Scholar 

  • Zemanová M, Fellner P, Chovancová M. The preparation of combined aluminium oxide coatings on aluminium substrates. Chem Pap. 1996;50:55–9.

    Google Scholar 

  • Zhang XJ, Li Q, Zhao SY, Gao CX, Wang L, Zhang J. Improvement in the oxidation resistance of γ-TiAl-based alloy by sol-gel derived Al2O3 film. Appl Surf Sci. 2008a;255:1860–4.

    CAS  Google Scholar 

  • Zhang XJ, Li Q, Zhao SY, Gao CX, Zhang J. Sol-gel Al2O3/ZrO2 duplex films for protection of a γ-TiAl-based alloy against high-temperature oxidation. J Sol-Gel Sci Technol. 2008b;47:107–14.

    CAS  Google Scholar 

  • Zhang X, Honkanen M, Pore V, Levänen E, Mäntylä T. Effect of heat treating gel films on the formation of superhydrophobic boehmite flaky structures on austenitic stainless steel. Ceram Int. 2009;35:1559–64.

    CAS  Google Scholar 

  • Zhang X, Mao L, Du J, Wei HJ. Atomic oxygen erosion resistance of sol-gel oxide films on Kapton. J Sol-Gel Sci Technol. 2014;69:498–503.

    CAS  Google Scholar 

  • Zhao J, Ma N, Liu B, Zhou Y, Xu C, Kong J. Photoelectrochemistry of photosynthetic reaction centers embedded in Al2O3 gel. J Photochem Photobiol A. 2002;152:53–60.

    CAS  Google Scholar 

  • Zhong X, Quing L, Chen B, Wang J, Hu J, Hu W. Effect of sintering temperature on corrosion properties of sol-gel based Al2O3 coatings on pre-treated AZ91D magnesium alloy. Corros Sci. 2009;51:2950–8.

    CAS  Google Scholar 

  • Zhou L, Wang YF, Ren FM, Cui XR, Wang XY, Zeng JH. Alumina coatings on fluorine-doped tin oxide@titanium dioxide as photoanode for dye-sensitized solar cells. Electrochim Acta. 2015;173:534–9.

    CAS  Google Scholar 

  • Zhu M, Li M, Li Y, Zhou Y. Influence of sol-gel derived Al2O3 film on the oxidation behavior of a Ti3Al based alloy. Mater Sci Eng A. 2006;415:177–83.

    Google Scholar 

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Nofz, M. (2018). Alumina Thin Films. In: Klein, L., Aparicio, M., Jitianu, A. (eds) Handbook of Sol-Gel Science and Technology. Springer, Cham. https://doi.org/10.1007/978-3-319-32101-1_133

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