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Role of Oxygen in PECVD Carbon Nanotubes Growth: Experiments and Modeling
We investigate by modeling supported by experiments the role of oxygen in carbon nanotubes (CNT) growth by plasma enhanced chemical vapor deposition...
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Fabrication of Paper-Based Microfluidic Devices Using PECVD for Selective Separation
The interest in microfluidic devices is increasing day by day due to consuming much lower amount of chemicals. Paper-based microfluid device is one...
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Preparing Thin Gallium Sulphide Films via PECVD and Studying Their Properties
AbstractThin films of GaS х are obtained via plasma-enhanced chemical vapor deposition (PECVD) for the first time, while high-purity volatile...
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PECVD Preparation of Nitrogen Plasma Do** SiO2@TiO2 Composites with a Core-Shell Structure for Lithium-Ion Battery Anode
AbstractNitrogen plasma-doped SiO 2 @TiO 2 composites were prepared by plasma-enhanced chemical vapor deposition (PECVD). SiO 2 @TiO 2 with a core-shell...
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The Effect of the Process Parameters on the Growth Rate and Composition of the Anti Scratch Films Deposited from TEOS by AP-PECVD on Polycarbonate
In this paper we report on a study of the composition and growth rate of anti scratch silica-like coatings deposited on polycarbonate (PC) in an...
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The Effect of the Process Parameters on the Composition and Properties of Silica-Like Films Deposited by Atmospheric Pressure PECVD in the System TEOS-He-O2
In this paper we report on a study of an atmospheric pressure plasma enhanced chemical vapor deposition process based on a simple dielectric barrier...
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Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles
In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition...
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Environmentally Friendly Approach for the Plasma Surface Modification of Fabrics for Improved Fog Harvesting Performance
Fog harvesting from the air is one of the sustainable and effective methods to obtain fresh water. Energy-free fog collector systems are widely used...
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Effect of Power on Crystallinity and Opto-Electronic Properties of Silicon Thin Films Grown Using VHF PECVD Process
The silicon thin films have been deposited using VHF (60 MHz) plasma enhanced chemical vapor deposition (PECVD) process. The influence of the power...
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The Effects of Porous Silicon and Silicon Nitride Treatments on the Electronic Qualities of Multicrystalline Silicon for Solar Cell Applications
This work used plasma-enhanced chemical vapor deposition (PECVD) at low temperatures to deposit a silicon nitride layer on multicrystalline silicon...
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Control of CeO2 Defect Sites for Photo- and Thermal- Synergistic Catalysis of CO2 and Methanol to DMC
Quadrangular-pyramid-octahedral CeO 2 with defects was successfully prepared and first used as effective and reusable heterogeneous catalyst for...
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Crystallization of Hydrogenated Amorphous Silicon Thin Films Using Combined Continuous Wave Laser and Thermal Annealing
The thermal process of amorphous silicon thin film crystallization when combined with an aluminum (Al) film using a continuous wave (CW) laser is...
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Experimental Methods
Magnetomicrofluidic chip fabrication methods are explained. These techniques are the microfabrication techniques widely used in semiconductor...
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Plasma-Enhanced Chemical Vapor Deposition of Thin GaS Films on Various Types of Substrates
AbstractGallium monosulfide (GaS), a representative of Group III monochalcogenide layered materials, is a wide-bandgap semiconductor. It is...
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Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materials
The composition of hydrogen and hydrogen-methane plasmas containing ~ 10% of BX 3 , SiX 4 , GeX 4 (X = F, Cl), SF 6 , MoF 6 and WF 6 is calculated for the...
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Electrochemical sensing platform based on screen-printed carbon electrode modified with plasma polymerized acrylonitrile nanofilms for determination of bupropion
A original electrochemical sensing platform, based on screen-printed electrodes modification with plasma polymerized acrylonitrile (pp-AN)...
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Parametric Study of Plasma Characteristics and Carbon Nanofibers Growth in PECVD System: Numerical Modeling
The aim of the present work is to develop a numerical model to understand and optimize the process parameters for the growth of carbon nanofibers...
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Mathematical Evaluation of a-Si:H Film Formation in rf-PECVD Systems
Radio frequency plasma enhanced chemical vapor deposition (rf-PECVD) is an efficient technique for preparing hydrogenated amorphous silicon (a-Si:H)...
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Study of Optical Properties of Single and Double Layered Amorphous Silicon Nitride Films for Photovoltaics Applications
This work focuses on the optical properties of single- and double-layer amorphous silicon nitride (a-SiN x :H) thin films of different stoichiometry...