Page
%P
![Loading...](https://link.springer.com/static/c4a417b97a76cc2980e3c25e2271af3129e08bbe/images/pdf-preview/spacer.gif)
-
Article
Simple new ultrasonic piezoelectric actuator for precision linear positioning
This paper presents a new linear piezoelectric actuator for linear translation. The positioning stage driven by the actuator has a very simple and compact structure consisting of a linear guide and the linear ...