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    Article

    Recent Development of Piezoelectric Fast Tool Servo (FTS) for Precision Machining

    With an increasing demand of photoelectric components, the micro/ultraprecision machining technology has become more and more important. However, for some particular applications such as micro lens array for l...

    Yung-Tien Liu in International Journal of Precision Engineering and Manufacturing (2024)

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    Chapter and Conference Paper

    A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators

    A three degree-of-freedom (3-DOF) precision positioning stage with a half-sphere shape is proposed for the applications such as fiber alignment and optical mirror adjustment. An experimental setup consisting o...

    Yung-Tien Liu, Guo-You Lee in Towards Synthesis of Micro-/Nano-systems (2007)