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    Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition

    Highly (111)-oriented and conformal iridium (Ir) films were deposited by a liquid source metalorganic-chemical-vapor-deposition process on various substrates. An oxygen-assisted pyrolysis of (methylcyclopentad...

    Jaydeb Goswami, Chang-Gong Wang, Prashant Majhi… in Journal of Materials Research (2001)