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    Article

    Improving the production of high-performance solar-blind β-Ga2O3 photodetectors by controlling the growth pressure

    In this work, β-Ga2O3 films are obtained by the RF magnetron sputtering method. Effects of the growth pressure on properties of the deposited β-Ga2O3 films and the corresponding solar-blind metal–semiconductor–me...

    Zhe Li, Zhiyuan An, Yu Xu, Yaolin Cheng, Ya’nan Cheng… in Journal of Materials Science (2019)