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Article
Effect of Ni silicide density on electrical performance of silicide-induced crystallized polycrystalline silicon thin-film transistors
The electrical performance of low temperature polycrystalline silicon (LTPS) thin-film transistors (TFTs) fabricated by silicide-induced crystallization (SIC) is greatly affected by metal contamination such as...
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Article
Planarized thick copper gate polycrystalline silicon thin film transistors for ultra-large AMOLED displays
A planarized thick copper (Cu) gate low temperature polycrystalline silicon (LTPS) thin film transistors (TFTs) is fabricated for ultra-large active-matrix organic light-emitting diode (AMOLED) displays. We in...
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Article
Erratum to: Do** Effect on the Metal-induced Lateral Crystallization Rate
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Article
Effect of LDD structure on electrical properties of polysilicon n-TFT prepared by metal-induced lateral crystallization
It is known that MILC polysilicon thin-film transistors (TFTs) show excellent electrical properties except for a relatively high leakage current. In this work, a lightly doped drain structure (LDD) was prepare...
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Article
High performance low temperature polycrystalline Si thin-film transistors fabricated by silicide seed-induced lateral crystallization
A novel and simple crystallization method for high performance polycrystalline silicon (poly-Si) thin-film transistors (TFTs) using Ni silicide seed-induced lateral crystallization (SILC) was proposed in this ...
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Article
Gettering of Ni silicide to minimize the leakage current in metal-induced crystallized polycrystalline silicon thin-film transistors
Metal-induced lateral crystallization (MILC) technology has been regarded as the only alternative for low temperature polycrystalline silicon (poly-Si) since it became apparent that laser technology still had ...
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Article
Do** effect on the metal-induced lateral crystallization rate
The effects of phosphorus do** and boron do** on the metal-induced lateral crystallization (MILC) rate have been studied. In the case of phosphorus do**, the MILC rate is very sensitive to the sequence o...
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Article
High performance poly-Si thin film transistors fabricated by self-aligned seed induced lateral crystallization
In this study, a low temperature polycrystalline silicon (LTPS) thin-film transistor (TFT) was fabricated by self-aligned silicide seed induced lateral crystallization (SA-SILC). In comparison with a self-alig...