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5 Result(s)

within S. V. Ksenich Remove this filter Surfaces and Interfaces, Thin Films Remove this filter

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  1. No Access

    Article

    Computer Analysis of AFM Images of a Silicon Surface Implanted with Zinc Ions and Oxidized at Elevated Temperatures

    A computer study of the morphological characteristics of the AFM image of a self-organized system of surface hillocks in CZ n-Si (100) samples doped with zinc under conditions of hot implantation and oxidized at ...

    V. N. Sokolov, O. V. Razgulina… in Journal of Surface Investigation: X-ray, S… (2019)

  2. No Access

    Article

    Modification of Zinc-Implanted Silicon by Swift Xenon Ion Irradiation

    50 keV 64Zn+ ions to a dose of 5 × 1016 cm–2 are implanted into substrates of single-crystal n-type silicon. Then the samples are irradiated at room temperature with 167 MeV 132Xe26+ ions with a fluence ranging f...

    V. V. Privezentsev, V. A. Skuratov… in Journal of Surface Investigation: X-ray, S… (2018)

  3. No Access

    Article

    Influence of annealing temperature and its atmosphere on the properties of zinc implanted silicon

    The presented results characterize nanoparticle formation in n-Si(100) samples implanted with 50-keV 64Zn+ ions (the dose is 5 × 1016 cm‒2) at room temperature followed by heat treatment in an oxygen or nitrogen ...

    V. V. Privezentsev, V. S. Kulikauskas… in Journal of Surface Investigation: X-ray, S… (2017)

  4. No Access

    Article

    The effect of silicon-substrate orientation on the local piezoelectric characteristics of LiNbO3 films

    The domain structure of lithium-niobate thin films grown on Si(111) and Si(100) substrates coated with a native oxide layer with a thickness of no less than 2 nm is investigated by X-ray diffraction, scanning ...

    D. A. Kiselev, R. N. Zhukov, S. V. Ksenich… in Journal of Surface Investigation. X-ray, S… (2016)

  5. No Access

    Article

    Structure of Si near-surface layer after 64Zn+ ion implantation at elevated temperature

    The results of studying the structure and composition of the surface layer of a Si plate after 64Zn+ ion implantation and thermal annealing in oxygen are presented. The ions are implanted into a substrate heated ...

    V. V. Privezentsev, V. S. Kulikauskas… in Journal of Surface Investigation. X-ray, S… (2015)