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within S. Konishi Remove this filter Electronics and Microelectronics, Instrumentation Remove this filter

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  1. No Access

    Article

    Position feedback control for electrostatically controlled linear actuator

    In this paper, we introduce a position feedback control for an electrostatically controlled linear actuator. The electrostatically controlled linear actuator, which is fabricated using microelectromechanical s...

    T. A. Nguyen, S. Konishi in Microsystem Technologies (2016)

  2. No Access

    Article

    Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamline

     A compact beamline dedicated to hard x-ray deep lithography for fabrication of high aspect ratio MEMS microparts has been developed. The exposure stage was only 3 meters away from the synchrotron radiation (S...

    S. Sugiyama, Y. Zhang, M. Hosaka, H. Ueno, O. Tabata… in Microsystem Technologies (1998)