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  1. Article

    Open Access

    Two-Photon Laser Lithography of Functional Microstructures of Integrated Photonics: Waveguides, Microcavities, and Prism Input/Output Adapters of Optical Radiation

    The development and optimization of methods for creating functional elements of micron and sub-micron sizes for photonic integrated circuits is one of the main tasks of nanophotonics. Two-photon laser lithogra...

    A. I. Maydykovskiy, D. A. Apostolov, E. A. Mamonov, D. A. Kopylov… in JETP Letters (2023)

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