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  1. Article

    Open Access

    Two-Photon Laser Lithography of Functional Microstructures of Integrated Photonics: Waveguides, Microcavities, and Prism Input/Output Adapters of Optical Radiation

    The development and optimization of methods for creating functional elements of micron and sub-micron sizes for photonic integrated circuits is one of the main tasks of nanophotonics. Two-photon laser lithogra...

    A. I. Maydykovskiy, D. A. Apostolov, E. A. Mamonov, D. A. Kopylov… in JETP Letters (2023)

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    Article

    Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films

    Two-dimensional numerical simulations of a dc discharge in a CH4/H2/N2 mixture in the regime of deposition of nanostructured carbon films are carried out with account of the cathode electron beam effects. The dis...

    K. V. Mironovich, Yu. A. Mankelevich, D. G. Voloshin… in Plasma Physics Reports (2017)