Skip to main content

2 Result(s)

within R. Moazzami Remove this filter Materials Science, general Remove this filter

and

  1. No Access

    Article

    Impact of a Ti Adhesion Layer on Pt/PZT/Pt Capacitors

    A five-factor, full-factorial experiment on process sensitivity of non-volatile polarization, Pnv, for Pt/PZT/Pt capacitors shows the most dramatic factor is the use, or not, of a Ti adhesion layer for the bottom...

    R. E. Jones Jr., P. D. Maniar, J. L. Dupuie, J. Kim… in MRS Online Proceedings Library (1994)

  2. No Access

    Article

    Impact of Backend Processing on Integrated Ferroelectric Capacitor Characteristics

    Integration of a ferroelectric capacitor module in a standard CMOS process subjects the ferroelectric to various ambients during backend processing, some of which can render the ferroelectric essentially non-o...

    P.D. Maniar, R. Moazzami, R. E. Jones, A. C. Campbell… in MRS Online Proceedings Library (1993)