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within R. Moazzami Remove this filter Materials Science Remove this filter Applied and Technical Physics Remove this filter Characterization and Evaluation of Materials Remove this filter

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  1. No Access

    Article

    Impact of Backend Processing on Integrated Ferroelectric Capacitor Characteristics

    Integration of a ferroelectric capacitor module in a standard CMOS process subjects the ferroelectric to various ambients during backend processing, some of which can render the ferroelectric essentially non-o...

    P.D. Maniar, R. Moazzami, R. E. Jones, A. C. Campbell… in MRS Online Proceedings Library (1993)

  2. No Access

    Article

    Impact of a Ti Adhesion Layer on Pt/PZT/Pt Capacitors

    A five-factor, full-factorial experiment on process sensitivity of non-volatile polarization, Pnv, for Pt/PZT/Pt capacitors shows the most dramatic factor is the use, or not, of a Ti adhesion layer for the bottom...

    R. E. Jones Jr., P. D. Maniar, J. L. Dupuie, J. Kim… in MRS Online Proceedings Library (1994)