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    A method to pattern Pd over-layers on GdMg films and its application to increase the transmittance of metal hydride optical switches

    A process to pattern Pd over-layers on reactive metal films was developed using ion milling through a tungsten trioxide mask patterned by photolithography and wet etching. The WO3 mask exhibited a low Ar+ sputter...

    R. Armitage, M. Cich, M. Rubin, E.R. Weber in Applied Physics A (2000)