Skip to main content

and
  1. Article

    Open Access

    Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films

    VO2 thin films were grown on silicon substrates using Al2O3 thin films as the buffer layers. Compared with direct deposition on silicon, VO2 thin films deposited on Al2O3 buffer layers experience a significant im...

    Dainan Zhang, Tianlong Wen, Ying **ong, Donghong Qiu, Qiye Wen in Nano-Micro Letters (2017)