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  1. No Access

    Article

    Amorphous Hydrogenated Silicon Thin film Transistors Manufactured by a Photo-CVD Technique

    In this paper we report on the production of thin film transistors using a novel photo-enhanced chemical vapour deposition process. Both the active layer, amorphous silicon, and the gate dielectric, silicon di...

    Stephen D. Baker, W. I. Milne, P. A. Robertson in MRS Online Proceedings Library (2011)

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    Article

    Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp

    This paper reviews the production of silicon oxide thin films using a novel photoenhanced deposition technique incorporating a windowless nitrogen discharge lamp contained within the deposition vessel. This pr...

    S. D. Baker, W. I. Milne, P. A. Robertson in Applied Physics A (1988)

  3. No Access

    Article

    Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp

    This paper reviews the production of silicon oxide thin films using a novel photoenhanced deposition technique incorporating a windowless nitrogen discharge lamp contained within the deposition vessel. This pr...

    S. D. Baker, W. I. Milne, P. A. Robertson in Applied Physics A (1988)

  4. No Access

    Article

    Hydrogenated Amorphous Silicon Thin-Film Deposition by Direct Photo-Enhanced Decomposition of Silane Using an Internal Hydrogen Discharge Lamp

    Hydrogenated amorphous silicon (a-Si:H) thin films have been deposited from silane using a novel photo-enhanced decomposition technique. The system comprises a hydrogen discharge lamp contained within the reac...

    P. A. Robertson, W. I. Milne in MRS Online Proceedings Library (1986)