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Amorphous Hydrogenated Silicon Thin film Transistors Manufactured by a Photo-CVD Technique
In this paper we report on the production of thin film transistors using a novel photo-enhanced chemical vapour deposition process. Both the active layer, amorphous silicon, and the gate dielectric, silicon di...
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Article
Hydrogenated Amorphous Silicon Thin-Film Deposition by Direct Photo-Enhanced Decomposition of Silane Using an Internal Hydrogen Discharge Lamp
Hydrogenated amorphous silicon (a-Si:H) thin films have been deposited from silane using a novel photo-enhanced decomposition technique. The system comprises a hydrogen discharge lamp contained within the reac...