Skip to main content

and
  1. Article

    Open Access

    Experimental and Thermodynamic Assessment of the Nb-Ni-Y System

    Phase equilibria in the ternary Nb-Ni-Y system are studied experimentally for the first time using x-ray diffraction, electron probe microanalysis, and differential scanning calorimetry in combination with lev...

    N. Mattern, M. Zinkevich, W. Löser, G. Behr in Journal of Phase Equilibria and Diffusion (2008)

  2. No Access

    Chapter

    Advanced Barriers for Copper Interconnects

    Both Ta-Si-N and W-Si-N films have promising properties as diffusion barriers for copper metallization. For Ta-Si-N films with a silicon content of ∼ 20 at%, as an optimised system regarding thermal stability ...

    M. Hecker, R. Hübner, J. Acker, V. Hoffmann in Materials for Information Technology (2005)