Page
%P
-
Article
Polymer coated γ-aminopropyltriethoxysilane-modified α-alumina non-spherical nanocomposite abrasives and their chemical mechanical polishing behavior on glass-ceramic substrate
This study aimed to overcome limitations associated with the use of alumina nanoparticles in the semiconductor manufacturing industry, including high hardness, inadequate dispersion, and substandard post-polis...