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    Polymer coated γ-aminopropyltriethoxysilane-modified α-alumina non-spherical nanocomposite abrasives and their chemical mechanical polishing behavior on glass-ceramic substrate

    This study aimed to overcome limitations associated with the use of alumina nanoparticles in the semiconductor manufacturing industry, including high hardness, inadequate dispersion, and substandard post-polis...

    Xuemei Tian, Wenyong Chen, Minhua Zhu, Hongyan Wang, Yuhua Liu… in Iranian Polymer Journal (2024)