Skip to main content

1 Result(s)

within Minglei Lu Remove this filter Materials Science Remove this filter

and

  1. No Access

    Article

    Promotion of boron diffusion and gettering by employing thin Al2O3 layer as a reaction barrier

    The formation of a boron-rich layer (BRL) is a common phenomenon during the fabrication of boron (B) emitter due to different solubility of B in the silicon oxide layer and the silicon substrate. In our work, ...

    Zhen Zhang, Ning Yang, Minglei Lu, **ao Yuan… in Journal of Materials Science: Materials in… (2021)