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Article
Self-ion irradiation effects on mechanical properties of nanocrystalline zirconium films
Zirconium thin films were irradiated at room temperature with an 800 keV Zr+ beam using a 6 MV HVE Tandem accelerator to 1.36 displacement per atom damage. Freestanding tensile specimens, 100 nm thick and 10 nm g...
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Article
Thermal Conductivity Measurement of Low-k Dielectric Films: Effect of Porosity and Density
The thermal conductivity of low-dielectric-constant (low-k) SiOC:H and SiC:H thin films has been measured as a function of porosity using a heat transfer model based on a microfin geometry and infrared thermometr...
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Article
Atomic Mobilities in the Ag-Cu-Sn Face-Centered Cubic Lattice
Knowledge of atomic mobilities is necessary to predict the evolution of microstructure. The theoretical description of atomic mobilities is connected to the chemical potentials of the components in a given pha...
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Article
MEMS for In Situ Testing—Handling, Actuation, Loading, and Displacement Measurements
Mechanical testing of micro- and nanoscale materials is challenging due to the intricate nature of specimen preparation and handling and the required load and displacement resolution. In addition, in Situ testing...
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Article
A review of MEMS-based microscale and nanoscale tensile and bending testing
Thin films at the micrometer and submicrometer scales exhibit mechanical properties that are different than those of bulk polycrystals. Industrial application of these materials requires accurate mechanical ch...
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Article
In-situ tensile testing of nano-scale specimens in SEM and TEM
We present a new experimental method for the mechanical characterization of freestanding thin films with thickness on the order of nanometers to micrometers. The method allows, for the first time, in-situ SEM ...
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Chapter and Conference Paper
In-situ Mechanical Characterization of a 100 Nanometer Thick Freestanding Aluminum Film in TEM Using MEMS Force Sensors
We present a new experimental method for mechanical characterization of freestanding thin films with thicknesses on the order of nanometers to micrometers. The method utilizes MEMS force sensors and allows, fo...
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Article
The lateral photovoltaic effect in CdS-Cu2S heterojunction solar cell
The lateral photovoltaic effect has been observed in CdS-Cu2S thin-film solar cells. The effect is more pronounced on the CdS side than on the Cu2S side of the cells. On the CdS side, where the contacts were form...