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Article
Thermal Conductivity Measurement of Low-k Dielectric Films: Effect of Porosity and Density
The thermal conductivity of low-dielectric-constant (low-k) SiOC:H and SiC:H thin films has been measured as a function of porosity using a heat transfer model based on a microfin geometry and infrared thermometr...
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Article
Atomic Mobilities in the Ag-Cu-Sn Face-Centered Cubic Lattice
Knowledge of atomic mobilities is necessary to predict the evolution of microstructure. The theoretical description of atomic mobilities is connected to the chemical potentials of the components in a given pha...
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Chapter and Conference Paper
In-situ Mechanical Characterization of a 100 Nanometer Thick Freestanding Aluminum Film in TEM Using MEMS Force Sensors
We present a new experimental method for mechanical characterization of freestanding thin films with thicknesses on the order of nanometers to micrometers. The method utilizes MEMS force sensors and allows, fo...