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    Chapter and Conference Paper

    In-situ Mechanical Characterization of a 100 Nanometer Thick Freestanding Aluminum Film in TEM Using MEMS Force Sensors

    We present a new experimental method for mechanical characterization of freestanding thin films with thicknesses on the order of nanometers to micrometers. The method utilizes MEMS force sensors and allows, fo...

    M. A. Haque, M. T. A. Saif in Transducers ’01 Eurosensors XV (2001)