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    Article

    Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

    Diamond like carbon (DLC) films were deposited on Si (111) substrates by microwave electron cyclotron resonance (ECR) plasma chemical vapour deposition (CVD) process using plasma of argon and methane gases. Du...

    S. B. Singh, M. Pandey, N. Chand, A. Biswas in Bulletin of Materials Science (2008)

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    Diamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studies

    Diamond-like carbon (DLC) films were deposited by microwave assisted chemical vapour deposition system using d.c. bias voltage ranging from −100 V to −300 V. These films were characterized by X-ray photoelectr...

    R. M. Dey, M. Pandey, D. Bhattacharyya, D. S. Patil in Bulletin of Materials Science (2007)

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    Spectroscopic studies of hydrogen related defects in CVD diamond

    Thin diamond films prepared by the hot filament chemical vapour deposition (HFCVD) method at various deposition pressures have been characterized using a variety of spectroscopic techniques. Interpretation of ...

    M Pandey, V Sugandhi, R D’cunha, A K Sikder, D S Mishra in Bulletin of Materials Science (1998)