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    In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method

    The use of corona charge method for monitoring the electrical properties of low-k dielectrics is investigated in this paper. First, the stability and reproducibility of k measurements are demonstrated on SiO2-bas...

    D. Fossati, C. Beitia, L. Plantier… in Journal of Materials Science: Materials in… (2008)