Page
%P
![Loading...](https://link.springer.com/static/c4a417b97a76cc2980e3c25e2271af3129e08bbe/images/pdf-preview/spacer.gif)
-
Article
In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method
The use of corona charge method for monitoring the electrical properties of low-k dielectrics is investigated in this paper. First, the stability and reproducibility of k measurements are demonstrated on SiO2-bas...