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    Growth of diamond and diamond-like films using a low energy ion beam

    Ion beam deposition provides an additional control of ion beam energy over the chemical vapor deposition methods. We have used a low energy ion beam of hydrogen and carbon to deposit carbon films on Si(100) wa...

    Y. P. Guo, K. L. Lam, K. M. Lui, R. W. M. Kwok, K. C. Hui in Journal of Materials Research (1998)