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  1. No Access

    Article

    Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor

    Electron beam induced deposition was performed using a Pt(PF3)4 precursor gas. Self-standing nanowires were produced on the edge of a molybdenum film, followed by two post-deposition processes; electron beam irra...

    M. Takeguchi, M. Shimojo, K. Furuya in Applied Physics A (2008)

  2. No Access

    Article

    Fabrication of self-standing nanowires, nanodendrites, and nanofractal-like trees on insulator substrates with an electron-beam-induced deposition

    Self-standing tungsten nanowires, nanodendrites, and nanofractal-like trees were fabricated on insulator (Al2O3) substrates with a process of electron-beam-induced decomposition in a transmission electron microsc...

    M. Song, K. Mitsuishi, M. Tanaka, M. Takeguchi, M. Shimojo, K. Furuya in Applied Physics A (2005)

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    Article

    Three-dimensional nanofabrication by electron-beam-induced deposition using 200-keV electrons in scanning transmission electron microscope

    Attempts were made to fabricate three-dimensional nanostructures on and out of a substrate by electron-beam-induced deposition in a 200-kV scanning transmission electron microscope. Structures with parallel wi...

    Z.Q. Liu, K. Mitsuishi, K. Furuya in Applied Physics A (2005)

  4. No Access

    Article

    Selective tungsten deposition into ordered nanohole arrays of anodic porous alumina by electron-beam-induced deposition

    The selective deposition of a metal (tungsten) into ordered nanohole arrays of an anodic porous alumina membrane was performed using an electron-beam-induced deposition process. After deposition, the membrane ...

    G.Q. **e, M. Song, K. Mitsuishi, K. Furuya in Applied Physics A (2004)

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    Article

    Electron beam-induced deposition using iron carbonyl and the effects of heat treatment on nanostructure

    Electron beam induced deposition was performed in a scanning electron microscope with a field emission gun using a precursor of iron carbonyl. Nanometer-sized dots and freestanding rods were produced on a carb...

    M. Shimojo, M. Takeguchi, M. Tanaka, K. Mitsuishi, K. Furuya in Applied Physics A (2004)

  6. No Access

    Article

    The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

    We have successfully fabricated nano-dots containing W from a metal–organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be ...

    M. Tanaka, M. Shimojo, K. Mitsuishi, K. Furuya in Applied Physics A (2004)