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    Article

    High-speed observation of pulse energy and pulse width dependences of damage generation in SiC during ultrashort pulse laser drilling

    Ultrashort pulse laser processing is a potential method for microfabricating silicon carbide (SiC). However, it is difficult to precisely process SiC using this method because numerous damages are generated ar...

    Junya Hattori, Yusuke Ito, Hiroshi Jo, Keisuke Nagato, Naohiko Sugita in Applied Physics A (2020)

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    Article

    Observation of damage generation induced by electron excitation and stress wave propagation during ultrashort pulse laser drilling of sapphire

    Ultrashort pulse laser processing is garnering significant attention as a method for processing sapphire. However, its preciseness is an issue owing to severe damage generated around a processed shape. In this...

    Huijie Sun, Yusuke Ito, Guoqi Ren, Junya Hattori, Keisuke Nagato… in Applied Physics A (2022)