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  1. No Access

    Article

    Thermometry of gas layers in thermal plasma CVD by pulsed-laser Rayleigh scattering

    The application of Pulsed-Laser Rayleigh Scattering Thermometry (PLRST) to Chemical Vapor Deposition (CVD) processing of diamond films in a thermal induction plasma is demonstrated. Temperature profiles were m...

    J. Larjo, J. Vattulainen, R. Hernberg in Applied Physics B (1996)

  2. No Access

    Article

    Atomic hydrogen concentration map** in thermal plasma chemical vapour deposition

    Two-dimensional maps of atomic hydrogen concentration in reactive gas layers were measured using two-photon laser-induced fluorescence. The measurements were made in conditions of diamond-film chemical vapour ...

    J. Larjo, J. Walewski, R. Hernberg in Applied Physics B (2001)

  3. No Access

    Article

    Two-dimensional atomic hydrogen concentration maps in hot-filament diamond-deposition environment

    This paper reports the two-dimensional map** of atomic hydrogen concentration with two-photon excited laser induced fluorescence in a multi-wire grid hot-filament chemical vapor deposition reactor. The measu...

    J. Larjo, H. Koivikko, K. Lahtonen, R. Hernberg in Applied Physics B (2002)